Journal ArticleDOI
Fabrication and Simulation of Diffractive Optical Elements with Superimposed Antireflection Subwavelength Gratings
Fredrik Nikolajeff,Björn Löfving,Mathias Johansson,Jörgen Bengtsson,Sverker Hård,Claus Heine +5 more
TLDR
With the aim of reducing surface reflections and increasing the diffraction efficiency, the superposition of subwavelength phase gratings onto blazed phase gratINGS was investigated and their optical performances compared.Abstract:
With the aim of reducing surface reflections and increasing the diffraction efficiency we investigated the superposition of subwavelength phase gratings onto blazed phase gratings. With direct-write electron-beam lithography bare blazed gratings and blazed gratings carrying subwavelength gratings were fabricated and their optical performances compared. For TE polarization the subwavelength-carrying gratings showed a maximum diffraction efficiency of 90.6%, whereas the corresponding maximum value for the bare grating was 86.3%. The experiment was simulated with rigorous diffraction theory.read more
Citations
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Journal ArticleDOI
Templated fabrication of large area subwavelength antireflection gratings on silicon
TL;DR: In this article, a bottom-up technique for fabricating wafer-scale, subwavelength-structured antireflection coatings on single-crystalline silicon substrates is presented.
Journal ArticleDOI
Biomimetic Antireflective Si Nanopillar Arrays
TL;DR: The basic purpose of this technique is to introduce a refractive index gradient between air and a substrate material by creating a structured layer, which can be substantially suppressed for a wide spectral bandwidth and over a large field of view.
Journal ArticleDOI
Fabrication of antireflection and antifogging polymer sheet by partial photopolymerization and dry etching.
TL;DR: It is shown that the efficiency of a thin film organic solar cell can be increased to 2.9% when a nanoturf film with the surface roughness of 34.73 nm is attached to indium tin oxide (ITO) glass and the performance is maintained even in the presence of water owing to superhydrophilic nature of the film.
Journal ArticleDOI
Biomimetic Antireflective Hierarchical Arrays
Hongbo Xu,Nan Lu,Gang Shi,Dianpeng Qi,Bingjie Yang,Haibo Li,Weiqing Xu,Lifeng Chi,Lifeng Chi +8 more
TL;DR: A simple method for the fabrication of biomimetic antireflective hierarchical arrays based on the combination of self-assembled polymer spheres and nanoimprint lithography (NIL) is reported.
Journal ArticleDOI
An antireflective silicon grating working in the resonance domain for the near infrared spectral region
TL;DR: In this paper, a silicon grating with antireflection properties in the [4μm, 6μm] spectral region was designed and fabricated for stealth applications when laser telemeters are used to localize moving targets.
References
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Journal ArticleDOI
Broadband antireflection gratings fabricated upon silicon substrates.
TL;DR: A two-dimensional subwavelength structured (SWS) surface upon a crystal silicon substrate patterned by electron beam lithography and etched by an SF(6) fast atom beam was fabricated and the reflectivity was examined.
Journal ArticleDOI
Antireflection behavior of silicon subwavelength periodic structures for visible light
TL;DR: In this paper, the authors describe subwavelength surfaces etched into silicon wafers that exhibit antireflection characteristics for visible light, which are fabricated by holographically recording a crossed-grating in a photoresist mask followed by reactive-ion etching to transfer the primary mask onto the silicon substrate.
Journal ArticleDOI
Optical elements with ultrahigh spatial-frequency surface corrugations.
Rolf C. Enger,Steven K. Case +1 more
TL;DR: The properties of optical elements fabricated by holographically recording an ultrahigh spatial-frequency pattern in a photoresist mask followed by reactive ion etching to transfer this pattern into the surface of a quartz substrate are discussed.
Journal ArticleDOI
Exponentially convergent and numerically efficient solution of Maxwell’s equations for lamellar gratings
TL;DR: In this paper, a new numerical mathematical method is presented for stack of lamellar gratings based on expansion of the electromagnetic field in terms of the eigenfunctions of the Helmholtz equation.
Journal ArticleDOI
Highly corrected close-packed microlens arrays and moth-eye structuring on curved surfaces
TL;DR: The fabrication of near-micrometer-sized close-packed coherent microlens arrays on spheric or aspheric surfaces has been accomplished by use of a compact holographic projector system that was developed for producing multimicrometer down to sub micrometer grid patterning on curved surfaces.