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Fracture toughness of silicon
C. P. Chen,M. H. Leipold +1 more
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TLDR
In this paper, a study to determine the fracture toughness and to characterize fracture modes of silicon as a function of the orientation of single-crystal and poly-crystalline material was presented.Abstract:
The paper presents a study to determine the fracture toughness and to characterize fracture modes of silicon as a function of the orientation of single-crystal and polycrystalline material. It is shown that bar specimens cracked by Knoop microhardness indentation and tested to fracture under four-point bending at room temperature were used to determine the fracture toughness values. It is found that the lowest fracture toughness value of single crystal silicon was 0.82 MN/m to the 3/2 in the 111 plane type orientation, although the difference in values in the 111, 110, and 100 planes was small.read more
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