Journal ArticleDOI
Laser precision engineering: from microfabrication to nanoprocessing
TLDR
In this paper, the authors proposed an approach to reduce the feature size to the nanometer scale by using laser cooling to localize atoms, which brought laser-processing technology to a new era of atomic engineering.Abstract:
Laser precision engineering is being extensively applied in industries for device microfabrication due to its unique advantages of being a dry and noncontact process, coupled with the availability of reliable light sources and affordable system cost. To further reduce the feature size to the nanometer scale, the optical diffraction limit has to be overcome. With the combination of advanced processing tools such as SPM, NSOM, transparent and metallic particles, feature sizes as small as 20 nm have been achieved by near-field laser irradiation, which has extended the application scope of laser precision engineering significantly. Meanwhile, parallel laser processing has been actively pursued to realize large-area and high-throughput nanofabrication by the use of microlens arrays (MLA). Laser thermal lithography using a DVD optical storage process has also been developed to achieve low-cost and high-speed nanofabrication. Laser interference lithography, another large area nanofabrication technique, is also capable of fabricating sub-100 nm periodic structures. To further reduce the feature size to the atomic scale, atomic lithography using laser cooling to localize atoms is being developed, bringing laser-processing technology to a new era of atomic engineering.read more
Citations
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Journal ArticleDOI
Three-dimensional optical laser lithography beyond the diffraction limit
TL;DR: In this article, a review of approaches aiming at translating this success in optical microscopy to optical lithography is presented, and basic principles and limitations, possible depletion mechanisms and recent lithography experiments by various groups are summarized.
Journal ArticleDOI
Polarization-independent dual-band infrared perfect absorber based on a metal-dielectric-metal elliptical nanodisk array
Bingxin Zhang,Yanhui Zhao,Qingzhen Hao,Brian Kiraly,Iam-Choon Khoo,Shufen Chen,Tony Jun Huang +6 more
TL;DR: Finite difference time domain (FDTD) simulations indicate that absorption efficiencies greater than 99% can be achieved for both resonance frequencies at normal incidence and the tunable range of the resonant frequency was modeled up to 700 nm by varying the dimensions of the three-layer, elliptical nanodisk array.
Journal ArticleDOI
Fano resonance in novel plasmonic nanostructures
TL;DR: Recently, a large number of experimental and theoretical works have revealed a variety of plasmonic nanostructures with the capabilities of Fano resonance (FR) generation as mentioned in this paper, and more attention is given to the optical properties of PLASmonic oligomers due to the high potential of such structures in optical spectra engineering.
Journal ArticleDOI
Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing
Jing Yang,Jing Yang,Fangfang Luo,Tsung Sheng Kao,Xiong Li,Ghim Wei Ho,Jinghua Teng,Xiangang Luo,Minghui Hong +8 more
TL;DR: In this paper, the fabrication of broadband anti-reflection Si surfaces by laser micro/nanoprocessing is investigated, where laser direct writing is applied to create microstructures on Si surfaces that reduce light reflection by light trapping.
Journal ArticleDOI
Laser nano-manufacturing - State of the art and challenges
Lin Li,Minghui Hong,Michael Schmidt,Minlin Zhong,Ajay P. Malshe,Bert Huis in’tVeld,Volodymyr Kovalenko +6 more
TL;DR: An overview of advances in laser based nano-manufacturing technologies including surface nano-structure manufacturing, production of nano materials (nanoparticles, nanotubes and nanowires) and 3D nano-structures manufacture through multiple layer additive techniques and nano-joining/forming is provided in this paper.
References
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Journal ArticleDOI
Finer features for functional microdevices
TL;DR: Micromachines can be created with higher resolution using two-photon absorption, and the results can be higher resolution than previously reported using single photon absorption techniques.
Journal ArticleDOI
Light in tiny holes
Cyriaque Genet,Thomas W. Ebbesen +1 more
TL;DR: The presence of tiny holes in an opaque metal film leads to a wide variety of unexpected optical properties such as strongly enhanced transmission of light through the holes and wavelength filtering, which are now known to be due to the interaction of the light with electronic resonances in the surface of the metal film.
Journal ArticleDOI
Plasmonics—A Route to Nanoscale Optical Devices
Stefan A. Maier,Mark L. Brongersma,Pieter G. Kik,Sheffer Meltzer,Ari A.G. Requicha,Harry A. Atwater +5 more
TL;DR: In this paper, a point dipole analysis predicts group velocities of energy transport that exceed 0.1c along straight arrays and shows that energy transmission and switching through chain networks such as corners and tee structures is possible at high efficiencies.
Journal ArticleDOI
Nanoelectronics from the bottom up
Wei Lu,Charles M. Lieber +1 more
TL;DR: This review presents a brief summary of bottom-up and hybrid bottom- up/top-down strategies for nanoelectronics with an emphasis on memories based on the crossbar motif, including experimental demonstrations of key concepts such lithography-independent, chemically coded stochastic demultipluxers.
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