Journal ArticleDOI
Limitations of focused ion beam nanomachining
TLDR
In this article, the effective sputter yield of silicon structures was determined as a function of the ion dose, and the shape of nanostructures was further determined by combining the beam shape and the angle dependence of the sputter yields.Abstract:
In this article, some limitations of the processing of structures with dimensions in the nanometer range by focused ion beams will be discussed. In order to enable exact depth control of nanometer structures, the effective sputter yield of silicon was determined as function of the ion dose. At ion doses below 1016 cm−2, the effective sputter yield is not constant and the volume of the area processed increases due to the implantation of ions. Material removal can be measured for doses above 2×1016 cm−2 and it reaches equilibrium for doses of about 3×1017 cm−2. This dose dependence of the effective sputter yield becomes especially effective in beam tail regions with low ion intensity. The shape of nanostructures is further determined by combining the beam shape and the angle dependence of the sputter yield which was experimentally determined. Using this approach with a Gaussian beam shape, a comparison of simulated and measured sidewall angles has shown good agreement for trench structures. Only sidewall regions close to the surface and to the bottom of deep structures show slight deviations. At the surface, non-Gaussian beam tails lead to unintentional sputtering at the corners of the processed area. At the bottom, forward scattered ions lead to higher sputter erosion.read more
Citations
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Journal ArticleDOI
Focused Ion Beam Microscopy and Micromachining
Cynthia A. Volkert,A. M. Minor +1 more
TL;DR: A broad range of fundamental studies and technological applications have been enhanced or made possible with focused ion beam (FIB) microscopes as mentioned in this paper, which has led to rapid development of their applications for materials science.
Journal ArticleDOI
Recent developments in micromilling using focused ion beam technology
TL;DR: The application of focused ion beam (FIB) technology in microfabrication has become increasingly popular as discussed by the authors, and this can distinguish the FIB technology from the contemporary photolithography process and provide a vital alternative to it.
Journal ArticleDOI
Tailored semiconductors for high-harmonic optoelectronics
Murat Sivis,Murat Sivis,Marco Taucer,Giulio Vampa,Kyle Johnston,André Staudte,Andrei Yu. Naumov,David M. Villeneuve,Claus Ropers,Paul B. Corkum +9 more
TL;DR: Nanofabricated structured targets of ZnO are used and varied the chemical composition of the sample to demonstrate that (modest) high harmonics can be generated as the light interacts with the target materials, and present the possibility of developing solid-state ultrafast optical devices.
Journal ArticleDOI
Review: Developments in micro/nanoscale fabrication by focused ion beams
TL;DR: Focused ion beam (FIB) technology has become increasingly attractive for the fabrication of micro/nano structures for the purpose of the demands in industry and research as mentioned in this paper, and various efforts to fabricate micro/nanoscale structure and geometrically complex structure are described.
Journal ArticleDOI
How to control solid state dewetting: A short review
Frédéric Leroy,Łukasz Borowik,Fabien Cheynis,Y. Almadori,Stefano Curiotto,M. Trautmann,Jean-Charles Barbe,Pierre Müller +7 more
TL;DR: In this article, the authors review the different parameters that influence the dewetting and illustrate how these parameters can be tuned by varying the thickness of the film, the annealing temperature, or the state of strain in the film.
References
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Journal ArticleDOI
A Monte Carlo computer program for the transport of energetic ions in amorphous targets
J.P. Biersack,L.G. Haggmark +1 more
TL;DR: In this article, a Monte Carlo computer program was developed for determining ion range and damage distributions as well as angular and energy distributions of backscattered and transmitted ions in amorphous targets.
MonographDOI
Ion-Solid Interactions: Fundamentals and Applications
TL;DR: In this article, the authors present a semi-empirical model for the enthalpy of formation in the liquid and solid state of an ion beam system, based on the Thomas-Fermi differential equation.
Journal ArticleDOI
Computer simulations of sputtering
TL;DR: In this paper, the authors concentrate mainly on sputtering calculations with the Monte Carlo code TRIM, which treats ion and recoil transport in amorphous matter and is based on binary collisions with target atoms initially at rest.
Journal ArticleDOI
Integrated circuit repair using focused ion beam milling
TL;DR: In this article, a method of repairing short circuit defects in integrated circuits using a submicron focused ion beam is described, which is applicable to cutting conductive lines in fully processed wafers, whether or not they have been encapsulated.
Journal ArticleDOI
Focused ion beam deposition of Pt containing films
J. Puretz,L. W. Swanson +1 more
TL;DR: Focused ion beam induced deposition of platinum films from a gas of methylcyclopentadienyl trimethyl platinum was reported in this article. But the results were limited to the case of W(CO)6 films.