Journal ArticleDOI
Modeling of the electromechanical performance of piezoelectric laminated microactuators
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TLDR
In this article, a generalized analytical formulation of mechanical deformations as a function of applied electric field is derived for an arbitrary lay-up of piezoelectric microactuators.Abstract:
Piezoelectric microactuators may be considered as multilayer laminated composites consisting of alternating layers of piezoelectric and non-piezoelectric materials A generalized analytical formulation of mechanical deformations as a function of applied electric field is derived for an arbitrary lay-up of such laminates Based on the generalized theory developed, specific formulae for the electromechanical performance of two cantilever microactuator lay-up geometries including a single piezo/elastic laminate and a bimorph, are derived In the modeling of the electromechanical performance of piezoelectric microactuators, the present model incorporates both d211 and d222 Furthermore, the elastic properties of both the piezoelectric and the elastic materials have been considered The developed model is evaluated based on a comparison with results from experimentread more
Citations
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Journal ArticleDOI
Thin Film Piezoelectrics for MEMS
TL;DR: In this article, the authors reviewed the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response for non-ferroelectric materials such as ZnO and AlN.
Journal ArticleDOI
CAD challenges for microsensors, microactuators, and microsystems
TL;DR: An overview of the present state of the art in CAD for MEMS is presented, with particular emphasis on the role of macromodels and test structures as part of the design environment.
Journal ArticleDOI
Optimization of a circular piezoelectric bimorph for a micropump driver
TL;DR: In this paper, a finite element method was used to optimize the deflection of a circular bimorph consisting of a single piezoelectric actuator, bonding material and elastic plate of finite dimensions.
Journal ArticleDOI
Quantitative analysis of complex glioma cell migration on electrospun polycaprolactone using time-lapse microscopy
Jed Johnson,M. Oskar Nowicki,Carol H. Lee,E. Antonio Chiocca,Mariano S. Viapiano,Sean E. Lawler,John J. Lannutti +6 more
TL;DR: This chemically and physically flexible model allows time-lapse analysis of glioma cell migration while recapitulating in vivo cell morphology, potentially allowing identification of physiological mediators and pharmacological inhibitors of invasion.
Journal ArticleDOI
Analysis and optimization of loaded cantilever beam microactuators
TL;DR: In this article, a simple and straightforward analytical model of the mechanical response of cantilever beam microactuators loaded normally at the tip is presented, considering only the commonly known material properties (stress-strain relations in beam length direction), whereas the material properties may vary continuously in the beam thickness direction.
References
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Journal ArticleDOI
Thin-film ZnO as micromechanical actuator at low frequencies
F.R. Blom,D.J. Yntema,F.C.M. van de Pol,Michael Curt Elwenspoek,J.H.J. Fluitman,T.J.A. Popma +5 more
TL;DR: In this paper, a model for low-frequency piezoelectric activity of thin-film ZnO films grown on CVD SiO2 was proposed, where a depletion layer was induced by means of a d.c. bias voltage.
Journal ArticleDOI
A planar process for microfabrication of a scanning tunneling microscope
TL;DR: In this article, a planar process for microfabrication of an integrated scanning tunneling microscope (STM) has been developed and operation of this "STM on a chip" has been demonstrated by imaging the surface of graphite with atomic resolution.
Proceedings ArticleDOI
Properties of piezoelectric thin films for micromechanical devices and systems
TL;DR: In this article, the Young's modulus and the electromechanical coupling (piezoelectric) constants of thin-film ZnO and PZT were investigated.
Journal ArticleDOI
Design of linear-motion microactuators using piezoelectric thin films
TL;DR: In this article, three types of microactuator for linear displacement are presented which use piezoelectric thin films for the electrical-to-mechanical energy conversion process.
Journal ArticleDOI
Ferroelectric Thin Films for Microelectromechanical Device Applications
TL;DR: In this paper, a pape report of piezoelectric coefficient, pyroelectric coefficient, dielectric constant, and Young's modulus for lead zirconate titanate and lead titanate thin films is presented.
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