Journal ArticleDOI
Monitoring plasma treatment of thin films by surface plasmon resonance.
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TLDR
Combined analysis of GXRD and SPR data confirmed that while top Al layer enables controlling plasma oxidation of Ag, the setup enables monitoring the same and is a first of its kind for in situ SPR studies where creation of low pressure is a prerequisite.Abstract:
We report the surface plasmon resonance (SPR) measurements during plasma treatment of thin films by an indigenously designed setup. From the measurements on Al (6.3 nm)/Ag (38 nm) bi-layer at a pressure of 0.02 mbar, the SPR position was found to be shifted by ∼20° after a plasma treatment of ∼7 h. The formation of oxide layers during plasma oxidation was confirmed by glancing angle x-ray diffraction (GXRD) measurements. Combined analysis of GXRD and SPR data confirmed that while top Al layer enables controlling plasma oxidation of Ag, the setup enables monitoring the same. The setup designed is a first of its kind for in situ SPR studies where creation of low pressure is a prerequisite.read more
Citations
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References
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Journal ArticleDOI
Surface plasmon resonance analysis of insulating AlO/sub x/ thin film for magnetic tunnel junctions prepared by natural oxidation method
TL;DR: In this paper, a surface plasmon resonance spectroscopy (SPRS) technique was used to determine the optimum oxidation state inside the barrier in a reflectivity mode with the barrier fabricated by a natural oxidation process.
Journal ArticleDOI
Real-time monitoring of plasma oxidation dynamics of subnanometer Al2O3 barriers for magnetic tunnel junctions
C.G.C.H.M. Fabrie,K. Knechten,JT Jürgen Kohlhepp,Henk J. M. Swagten,B Bert Koopmans,W. J. M. de Jonge +5 more
TL;DR: In this paper, it was shown that overoxidation of sub-nm thin Al2O3 barriers of magnetic tunnel junctions can be observed in real time using in situ differential ellipsometry measurements.