Journal ArticleDOI
Novel technique of making graded-refractive-index slab waveguides
Y. C. Cheng,W.D. Westwood +1 more
TLDR
In this article, a novel technique for making graded-refractive-index slab waveguides for integrated optics is presented, using the dependence of the optical properties on sputtering conditions.Abstract:
A novel technique is presented of making graded-refractive-index slab waveguides for integrated optics. Using the dependence of the optical properties on sputtering conditions, any variation in refractive-index profile in a film can be produced.read more
Citations
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Journal ArticleDOI
Variable refractive index and birefringent waveguides by sputtering tantalum in O(2)-N(2) mixtures.
TL;DR: Waveguide structures, such as interconnects, branching waveguides, and layered directional couplers, have been demonstrated using films with different indices, and the birefringence has been verified by observation of interference between TE and TM modes simultaneously coupled into the guide.
Patent
Planar waveguide lens, its utilization and method for its manufacture
TL;DR: In this paper, a planar waveguide lens is characterized in that the same is a gradient lens, whereby the refractive index profile transversely to the lens axis extends approximately parabolically.
Journal ArticleDOI
Automatic monitoring of deposition conditions during rf sputtering of dielectric materials
CW Pitt,IH Kirk,RJ Stevens +2 more
TL;DR: In this article, the authors examined the technology involved in developing supervision circuitry to monitor the parameters of a conventional commercially available rf sputtering system employed in the fabrication of high optical quality dielectric films for integrated-optics applications.
References
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Journal ArticleDOI
Optical waveguiding layers in LiNbO3 and LiTaO3
I.P. Kaminow,J.R. Carruthers +1 more
TL;DR: In this paper, positive refractive index layers in LiNbO3 and LiTaO3 have been produced by a novel out-diffusion technique, and the index profiles for a variety of conditions are measured directly with an interference microscope.
Journal ArticleDOI
Fabrication of single-crystal semiconductor optical waveguides by solid-state diffusion
TL;DR: Optical surface waveguides have been fabricated by diffusing selenium into single-crystal CdS substrates to produce graded composition cdSxSe1−x crystals.
Journal ArticleDOI
Cathode Dark‐Space Measurements and Deposition Rates of Tantalum in a Sputtering System
W. D. Westwood,R. Boynton +1 more
TL;DR: In this paper, measurements of the cathode dark-space distance have been made, both visually and electrically, for an argon discharge in a dc diode sputtering system fitted with a tantalum cathode.
Journal ArticleDOI
Graded-index planar dielectric waveguides
TL;DR: In this article, the authors investigated the properties of planar dielectric waveguides having a diffusion-induced index of refraction distribution and found that the spatial distribution of modes, group velocity, and mode spectrum of these guides differed qualitatively from the corresponding properties found in a slab waveguide.
Journal ArticleDOI
Losses in tantalum pentoxide waveguides
Y. C. Cheng,W. D. Festwood +1 more
TL;DR: In this paper, the authors made measurements of the losses in thin tantalum pentoxide films for different guided modes and analyzed the results to determine the loss mechanism, and the effects of bulk and surface loss mechanisms have been obtained and causes of these are discussed.