Open AccessJournal Article
Optical communication using micro corner cube reflectors
TLDR
In this paper, surface micromachined corner cube reflectors made of 250 /spl mu/m square hinged polysilicon plates have been demonstrated to transmit digital signals over a range of 2 meters by reflecting an interrogating 5 mW laser.Abstract:
Surface micromachined corner cube reflectors made of 250 /spl mu/m square hinged polysilicon plates have been demonstrated to transmit digital signals over a range of 2 meters by reflecting an interrogating 5 mW laser. Measured reflectance ranges from 34% to 77% for different mirror designs. Divergence of light reflected by CCR ranges from 15-35 mrad. The CCRs are electrostatically actuated with 10 to 20 V. The highest data rate transmitted with a CCR is 1 Kbps.read more
Citations
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Corner-cube retroreflectors based on structure-assisted assembly for free-space optical communication
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References
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Journal ArticleDOI
Three-dimensional micro-Fresnel optical elements fabricated by micromachining technique
TL;DR: In this article, a three-dimensional binary phase micro-Fresnel optical element standing perpendicular to the substrate was fabricated by micromachining technique, with a diameter of 650 µm, a focal length of 0.5 mm and an optical axis of 1 mm above the surface of the substrate.
Journal ArticleDOI
Dynamics of polysilicon parallel-plate electrostatic actuators
TL;DR: In this article, the response of a polysilicon parallel-plate electrostatic actuator to a.c. signals at different bias voltages has been measured with a laser interferometer.
Journal ArticleDOI
Micromachined corner cube reflectors as a communication link
TL;DR: In this article, a micromachined corner cube reflector was used to transmit data digitally by modulating reflected light intensity, and the reflectivity of polysilicon has been measured to be 24% and the total reflected power from the corner cube has been between 1 to 2% of the incident power.
Journal ArticleDOI
Surface-micromachined polysilicon MOEMS for adaptive optics
TL;DR: In this article, an overview of Air Force research and development programs in micro-opto-electro-mechanical systems (MOEMS) for adaptive optics using commercially available surface-micromachined polysilicon fabrication processes is presented.
Proceedings ArticleDOI
Realization of FDDI optical bypass switches using surface micromachining technology
S.S. Lee,L.Y. Lin,Ming C. Wu +2 more
TL;DR: In this article, a fiber data distribution interface (FDDI) optical bypass switch using the surface-micromachining technology is presented, which consists of four multimode optical fibers and a two-sided mirror sitting vertically on the top of a sliding plate.
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