Journal ArticleDOI
Preparing of a high speed bistable electromagnetic RF MEMS switch
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TLDR
In this article, a radio-frequency micro-electro-mechanical systems (RF MEMS) switch with bistable states based on electromagnetic actuation is presented.Abstract:
A radio-frequency micro-electro-mechanical systems (RF MEMS) switch with bistable states based on electromagnetic actuation is presented The switch has two stable positions due to the adoption of the permanent magnets, which will lead to a lower power consumption of the device With electromagnetic actuation arising from the planar coils, the cantilever beam can switch from one stable position to the other The structure sizes of the switch are simulated by the finite element software of the ANSYS 70 The device with a size of 20 mm × 22 mm is fabricated by UV-LIGA technology A current pulse with an amplitude of 50 mA is needed for the fabricated switches’ switching between two stable states that is in good agreement with the simulation, and the switching time is only approximately 20 μs The insertion loss is −011 dB, and the isolation is −43 dB at 3 GHzread more
Citations
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A nonlinear strain gradient beam formulation
TL;DR: In this paper, a nonlinear size-dependent Euler-Bernoulli beam model is developed based on a strain gradient theory, capable of capturing the size effect, considering the midplane stretching as the source of the nonlinearity in the beam behavior, the governing nonlinear partial differential equation of motion and the corresponding classical and non-classical boundary conditions are determined using the variational method.
Journal ArticleDOI
Size dependent buckling analysis of microbeams based on modified couple stress theory with high order theories and general boundary conditions
TL;DR: In this paper, the buckling analysis of three microbeam models based on modified couple stress theory is investigated, and a generalized differential quadrature (GDQ) method is employed to solve the governing differential equations.
Journal ArticleDOI
Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated with AlN Contour-Mode Resonators
TL;DR: In this article, a dual-beam switch design is presented that intrinsically compensates for the residual stress in the deposited films, requires a low actuation voltage (5 to 20 V) and facilitates active pull-off to open the switch and exhibits fast switching times (1 to 2 µs).
Journal ArticleDOI
Analytical solutions for the size dependent buckling and postbuckling behavior of functionally graded micro-plates
TL;DR: In this paper, the buckling and postbuckling analysis of FG micro-plates under different kinds of traction on the edges is investigated based on the modified couple stress theory, and the static equilibrium equations of an FG rectangular micro-plate as well as the boundary conditions are derived using the principle of minimum total potential energy.
Journal ArticleDOI
Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches
TL;DR: In this paper, a low-voltage complementary mechanical logic achieved by using body-biased aluminum nitride (AlN) piezoelectric microelectro-mechanical systems (MEMS) switches has been reported.
References
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Journal ArticleDOI
RF MEMS switches and switch circuits
TL;DR: In this paper, the authors concentrate on electrostatic switches at 0.1-100 GHz with high reliability (100 million to 10 billion cycles) and wafer-scale manufacturing techniques.
Proceedings ArticleDOI
Lifetime characterization of capacitive RF MEMS switches
Charles L. Goldsmith,John C. Ehmke,A. Malczewski,Brandon W. Pillans,S. Eshelman,Zhimin Yao,J. Brank,M. Eberly +7 more
TL;DR: In this paper, the first experimental characterization of dielectric charging within capacitive RF MEMS switches has been demonstrated and their lifetimes were measured using a dual-pulse waveform with 30 to 65 V of actuation voltage.
Proceedings ArticleDOI
Design of low actuation voltage RF MEMS switch
TL;DR: In this article, a low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported that utilize highly compliant serpentine spring folded suspensions together with large area capacitive actuators to achieve low actuation voltages while maintaining sufficient off-state isolation.
Journal ArticleDOI
Mechanical design and optimization of capacitive micromachined switch
TL;DR: In this paper, the design and optimization of a shunt capacitive micromachined switch with a thin metal membrane suspended over a center conductor, and fixed at both ends to the ground conductors of a coplanar waveguide (CPW) line is presented.
Journal ArticleDOI
Permanent magnet films for applications in microelectromechanical systems
TL;DR: In this paper, the authors reviewed several promising permanent magnet (PM) films used for the applications in microelectromechanical system (MEMS) and elucidated the selection rules for PM films.