Journal ArticleDOI
Sub-10 nm imprint lithography and applications
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TLDR
A new lithography paradigm that is based on deformation of a resist by compression molding rather than altering its chemical structure by radiation, and is designed to fabricate nanostructures inexpensively with high throughput is presented.Abstract:
New developments, further details, and applications of imprint lithography are presented. Arrays of 10 nm diameter and 40 nm period holes were imprinted not only in polymethylmethacrylate (PMMA) on silicon, but also in PMMA on gold substrates. The smallest hole diameter imprinted in PMMA is 6 nm. All the PMMA patterns were transferred to a metal using a liftoff. In addition, PMMA mesa’s of a size from 45 nm to 50 μm were obtained in a single imprint. Moreover, imprint lithography was used to fabricate the silicon quantum dot, wire, and ring transistors, which showed the same behavior as those fabricated using electron (e)-beam lithography. Finally, imprint lithography was used to fabricate nanocompact disks with 10 nm features and 400 Gbits/in.2 data density—near three orders of magnitude higher than current critical dimensions (CDs). A silicon scanning probe was used to read back the data successfully. The study of wear indicates that due to the ultrasmall force in tapping mode, both the nano-CD and the ...read more
Citations
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Journal ArticleDOI
Understanding the influence of hydraulic conditions on colloidal fouling development by using the micro-patterned nanofiltration membrane: Experiments and numerical simulation
Wentao Shang,Songwen Yang,Wenjie Liu,Pak Wai Wong,Rui Wang,Xiaoyan Li,Guo-Ping Sheng,Woon-min Lau,Alicia Kyoungjin An,Feiyun Sun +9 more
TL;DR: In this paper , optical coherence tomography (OCT) and particle migration trajectories were investigated by using Computational Fluid Dynamics (CFD) to understand the influence mechanism of the flow field around MNF membrane surface on particle deposition.
Dissertation
Etude des nanofils de silicium et de leur intégration dans des systèmes de récupération d'énergie photovoltaïque
TL;DR: In this paper, a porte sur la fabrication and the caracterisation of cellules solaires a jonction radiale a base d'assemblee de nanofils de silicium cristallin is presented.
Journal ArticleDOI
Magneto-Mechanical Surfaces Design.
TL;DR: A critical review involving the main aspects in the design of the patterned nanocomposites of magneto-mechanically active surfaces will be presented.
Journal ArticleDOI
High performance 100 mm-in-diameter true zero-order waveplates fabricated by imprint lithography
Jian Jim Wang,Xuegong Deng,Feng Liu,Lei Chen,Anguel Nikolov,Xiaoming Liu,Jiandong Deng,Paul Sciortino +7 more
TL;DR: In this article, a commercial quality high-performance true zero-order quarter waveplates based on artificial dielectric nanostructures were made by high throughput and low cost wafer-based nanofabrication processes.
Journal ArticleDOI
Integrated Real-Time Polarization Image Sensor Based on UV-NIL and Calibration Method
TL;DR: In this article , an integrated polarization sensor composed of polarization-dependent module and processing unit was constructed, which was used as processing unit to demodulate, reconstruct and display polarization image in real time.
References
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Single Charge Tunneling: Coulomb Blockade Phenomena in Nanostructures
TL;DR: Averin et al. as discussed by the authors proposed a single charge tunneling method to transfer electrons one-by-one in low-Capacitance tunnel junctions, and applied it to semiconductor nanostructures.