Journal ArticleDOI
Mold‐assisted nanolithography: A process for reliable pattern replication
Reads0
Chats0
TLDR
In this paper, a process for reproducibly and reliably realizing thin-layer patterning having details with dimensions of 100 nm or even less is described, which is called mold lithography, and the strengths of this process are its simplicity and low cost while maintaining compatibility with (standard) semiconductor technology processing.Abstract:
A process for reproducibly and reliably realizing thin‐layer patterning having details with dimensions of 100 nm or even less is described. This process has been called mold lithography. It is a two‐step process: First, a photopolymerization‐replication step is carried out, after which pattern transfer is realized through, e.g., wet or dry etching into the substrate material. We performed a number of elementary experiments to evaluate this process. Processing conditions are given and the obtained results are discussed. The strengths of this process are its simplicity and low cost while maintaining compatibility with (standard) semiconductor‐technology processing.read more
Citations
More filters
Patent
Organic light-emitting device
Yoon-Hyun Kwak,Seok-Hwan Hwang,Young-Kook Kim,Hye-jin Jung,Jong-hyuk Lee,Jin-O Lim,Hyung-Jun Song +6 more
TL;DR: In this paper, the authors presented a heterocyclic compound and an organic light-emitting device including the HOC compound, which have high efficiency, low driving voltage, high luminance and long lifespan.
Journal ArticleDOI
Nanofabricated and self-assembled magnetic structures as data storage media
Bruce D. Terris,T. Thomson +1 more
TL;DR: Nanofabrication of magnetic storage media, where servo marks, discrete tracks or individual islands are defined, offers the prospect for improved performance and increased areal density as discussed by the authors.
Journal ArticleDOI
Nanoimprint lithography: An old story in modern times? A review
TL;DR: Nanoimprint lithography (NIL) is a high throughput, high-resolution parallel patterning method in which a surface pattern of a stamp is replicated into a material by mechanical contact and three dimensional material displacement.
Proceedings ArticleDOI
Step and flash imprint lithography: a new approach to high-resolution patterning
Matthew E. Colburn,Stephen C. Johnson,Michael D. Stewart,S. Damle,Todd Bailey,Bernard Choi,M. Wedlake,Timothy Michaelson,Sidlgata V. Sreenivasan,John G. Ekerdt,C. Grant Willson +10 more
TL;DR: In this article, a template is created on a standard mask blank by using the patterned chromium as an etch mask to produce high-resolution relief images in the quartz.
Journal ArticleDOI
Step and flash imprint lithography: Template surface treatment and defect analysis
Todd Bailey,Byung Jin Choi,Matthew E. Colburn,M. Meissl,S. Shaya,John G. Ekerdt,Sidlgata V. Sreenivasan,Carlton G Willson +7 more
TL;DR: In this paper, an automated tool for step and flash imprint lithography was constructed to allow defect studies by making multiple imprints on a 200 mm wafer, and the imprint templates for this study were treated with a low surface energy, self-assembled monolayer to ensure selective release at the template-etch barrier interface.