Proceedings ArticleDOI
Toggle-switch - a new type of RF MEMS switch for power applications
B. Schauwecker,K.A. Strohm,W. Simon,Jan Mehner,J.-F. Luy +4 more
- Vol. 1, pp 219-222
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TLDR
In this paper, a new type of RF MEMS switch for power applications using a push-pull concept is described, which consist of a cantilever which is fixed by a suspension spring to the ground of the coplanar lines.Abstract:
A new type of RF MEMS switch for power applications using a push-pull concept is described. The switching element consist of a cantilever which is fixed by a suspension spring to the ground of the coplanar lines. The switching voltages are 30 V to close and 35 V to open. The switches exhibit low loss (<0.2 dB at 27 GHz) with good isolation (20 dB at 27 GHz).read more
Citations
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Journal ArticleDOI
Low-loss lateral micromachined switches for high frequency applications
TL;DR: In this article, two novel lateral metal-contact radio-frequency microelectromechanical system (RF MEMS) switches are reported, implemented with quasi-finite ground coplanar waveguide (FGCPW) configuration and actuated by applying electrostatic force on a high-aspect-ratio cantilever beam.
Proceedings ArticleDOI
Reduced order modeling of fluid structural interactions in MEMS based on model projection techniques
TL;DR: In this paper, a modal projection technique based on the harmonic transfer functions of the fluidic domain is used to add dissipative effects into existing macromodels for damped harmonic and transient analyses.
Journal ArticleDOI
Robust Design of RF-MEMS Cantilever Switches Using Contact Physics Modeling
Mohammed Shalaby,Zhongde Wang,Linda L.-W. Chow,Brian D. Jensen,John L. Volakis,Katsuo Kurabayashi,Kazuhiro Saitou +6 more
TL;DR: This paper presents the robust design optimization of an RF-MEMS direct contact cantilever switch for minimum actuation voltage and opening time, and maximum power handling capability, using a Strength Pareto Evolutionary Algorithm.
Journal ArticleDOI
Single-pole-double-throw switch based on toggle switch
TL;DR: In this paper, a single-pole double-throw (SPDT) switch based on the toggle switch is presented for low voltage actuation, high broadband application and enhanced power capability.
Proceedings ArticleDOI
Designing a Novel RF MEMS SWITCH for Broadband Power Applications
TL;DR: In this article, the design of a new type of RF MEMS "toggle" switch for broadband power applications is described, which consists of a cantilever, which is fixed by a torsion spring to the outer conductor of the coplanar line.
References
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Journal ArticleDOI
RF-MEMS switches for reconfigurable integrated circuits
TL;DR: In this article, the electrostatic microswitch is used in a number of existing circuits and systems, including radio front-ends, capacitor banks, and time-delay networks, for quasi-optical beam steering and electrically reconfigurable antennas.
Journal ArticleDOI
RF MEMS from a device perspective
TL;DR: The recent progress in MEMS for radio frequency (RF) applications from a device perspective is reviewed in this article, where switches and relays, tunable capacitors, integrated inductors, mechanical resonators and filters, and some representative microwave and millimetre-wave components are discussed.
Journal ArticleDOI
Micromechanical membrane switches on silicon
TL;DR: In this paper, the authors describe the design, fabrication, operating behavior, and potential applications of voltage-controlled, micromechanical switches, which are basically extremely small, electrostatically controlled mechanical relays, typically less than 100 µm long.
Proceedings ArticleDOI
Design of low actuation voltage RF MEMS switch
TL;DR: In this article, a low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported that utilize highly compliant serpentine spring folded suspensions together with large area capacitive actuators to achieve low actuation voltages while maintaining sufficient off-state isolation.
Journal ArticleDOI
A low voltage actuated micromachined microwave switch using torsion springs and leverage
TL;DR: In this article, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for lowvoltage operation, and the actuation voltage is /spl sim/5 V.