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Showing papers on "Deposition (chemistry) published in 1982"



Journal ArticleDOI
TL;DR: In this paper, MOS capacitors were formed on silicon substrates and their electrical properties were evaluated by capacitance-voltage (C‐V) measurements, which indicated a midgap density of surface states NSS = 2×1011 cm−2eV−1 for SiO2 layers deposited at 300°C.
Abstract: Silicon dioxide layers were formed by reacting silane with oxygen. The oxygen was ionized in an rf discharge chamber physically removed from the deposition zone. The excited oxygen species, which left the ionization chamber, reacted with silane regardless of the temperature, during deposition, to be chosen as an important parameter and at the same time avoided the adverse effects of placing the sample within an rf discharge. MOS capacitors were formed on silicon substrates and their electrical properties were evaluated by capacitance‐voltage (C‐V) measurements. An analysis of the quasistatic C‐V data indicates a midgap density of surface states NSS = 2×1011 cm−2eV−1 for SiO2 layers deposited at 300 °C.

119 citations


Book ChapterDOI
01 Jan 1982

111 citations


Journal ArticleDOI
TL;DR: (45)
Abstract: (45) Seifert, W. K., see ref 14, p 21. (46) Pym, J. G.; Ray, J. E.; Smith, G. W.; Whitehead, E. V. Anal. Chem. 1975,47, 1617. (47) Datillung, M.; Albrecht, P. Mar. Pollut. Bull. 1976, 7,13. (48) Ensminger, A,; Joly, G.; Albrecht, P. Tetrahedron Lett. 1978,18, 1575. (49) Simoneit, B. R. T.; Kaplan, I. R. Mar. Enuiron. Res. 1980, 3, 113. (50) Seifert, W. K.; Moldowan, J. M.; Smith, G. W.; Whitehead, E. V. Nature (London) 1978,271, 436. (51) Eganhouse, R. P.; Simoneit, B. R. T.; Kaplan, I. R. Enuiron. Sci. Technol. 1981, 15, 315. (52) Simoneit, B. R. T.; Mazurek, M. A.; Cahill, T. A. J. Air Pollut. Control Assoc. 1980, 30, 387. (53) Crisp, P. T.; Brenner, S.; Venkatesan, M. I.; Ruth, E.; Kaplan, I. R. Geochim. Cosmochim. Acta 1979,43,1791. (54) Swisher, R. D. J. Am. Oil Chem. SOC. 1963,40, 648. (55) Lake, J. L.; Nonvood, C.; Dimock, C.; Bowen, R. Geochim.

105 citations


Journal ArticleDOI
01 May 1982-Icarus
TL;DR: In this article, the effects of a prolonged interval of nondeposition on stratigraphy and the modification of the central polar stratigraphys by scarp margin effects are investigated.

102 citations


BookDOI
01 Jan 1982

100 citations



Journal ArticleDOI
TL;DR: It is proposed that the convergence zone of the estuarine front and the associated pycnocline serve to transfer encysting dinoflagellate forms from surface waters to their ultimate seedbed locations.
Abstract: The dinoflagellate Gyrod~n~urn uncatenum forms massive summer red tides in Chesapeake Bay (USA) and tributary estuaries These blooms are delimited in the downstream direction by estuanne fronts which may serve to concentrate and recirculate the population Toward the end of the bloom cycle, G uncatenum sexual stages accumulate in the frontal convergence and are transported downward along the frontal interface These stages are retained below the pycnocline in net upstream flowing bottom waters and settle out into the sediments along the subsurface transport pathway Examination of s e d ~ m e n t s indicates that major deposits of cysts of G uncatenurn are bounded in an upstream direction by a b e n t h ~ c front (where the pycnocllne intersects the bottom) Above this area, motile cells and sexual stages are absent from the water column and cysts are absent from the sediment Streamflow-induced variations in the location of the estuarine front in 1979 and in 1980 result in deposition of cysts in different regions predictable from examination of the location of the convergence Thus it IS proposed that the convergence zone of the estuarine front and the associated pycnocline serve to transfer encysting dinoflagellate forms from surface waters to their ultimate seedbed locations

93 citations



Journal ArticleDOI
TL;DR: In this paper, the deposition of polycrystalline and amorphous silicon from silane in H 2 and N 2 carrier gases has been studied, and it was found that at low input pressures of silane the growth rate is linearly proportional to the silane input pressure both in hydrogen and in nitrogen.

70 citations



Patent
Stephen C. Miller1
18 Feb 1982
TL;DR: In this article, a process for use in the deposition of a semiconductor film involves: producing a stream of reactive gaseous species within a first chamber, the reactive species containing a substance to be included within the film, passing the reactive items to a work environment distinct from the first chamber; and incorporating the substance from the reactive materials into a film deposited within the work environment.
Abstract: Process for use in the deposition of a semiconductor film involves: producing a stream of reactive gaseous species within a first chamber, the reactive species containing a substance to be included within the film; passing the reactive species to a work environment distinct from the first chamber; and incorporating the substance from the reactive species into a film deposited within the work environment.

Journal ArticleDOI
TL;DR: In this paper, the initial stage of deposition of zinc from buffered zinc sulphate solution (pH = 3.55) was studied using platinum, gold and graphite as substrates.

Journal ArticleDOI
S P Newman1, F Morén1, D. Pavia, O. Corrado, Stewart W. Clarke 
TL;DR: In this paper, the effects of changes in metered volume and propellant vapour pressure on the deposition of a pressurized inhalation aerosol have been studied in 10 patients with obstructive airway disease.

Journal ArticleDOI
TL;DR: In this paper, critical current densities for the initiation of dendrite growth and powder formation in potentiostatic and galvanostatic deposition are determined, and induction times for dendritic growth formation are discussed.
Abstract: Critical current densities for the initiation of dendrite growth and powder formation in potentiostatic and galvanostatic deposition are determined. Induction times for dendritic growth formation in potentiostatic and galvanostatic deposition are discussed.




Journal ArticleDOI
TL;DR: For the past 51 years nitrate deposition in snow and firn layers at the South Pole exhibits a significant linear relationship with sunspot numbers and the index of geomagnetic activity as discussed by the authors.
Abstract: For the past 51 years nitrate deposition in snow and firn layers at the South Pole exhibits a significant linear relationship with sunspot numbers and the ‘aa’ index of geomagnetic activity. Currently known atmospheric processes may explain these results. A high resolution nitrate record from deep ice cores could be valuable for both Sun and climate studies.

Journal ArticleDOI
TL;DR: In this article, it was shown that PAN and its homologues are important carriers of photochemically-active NO x in aged air masses, demonstrating the potential for long range transport of ozone over surfaces where the deposition is inefficient, such as over water.

Journal ArticleDOI
TL;DR: The hypothesis that the release of bag cell hormones and the subsequent movement of eggs normally maintain the previously initiated head movements so that egg laying behaviors stop when all of the eggs are deposited is suggested.


Journal ArticleDOI
TL;DR: In this article, the electrical and photoelectrochemical properties of TiO2 films, which were obtained by the vapour decomposition of ethyl titanate, are described.
Abstract: The electrical and photoelectrochemical properties of TiO2 films, which were obtained by the vapour decomposition of ethyl titanate, are described. The electrical properties depend mainly on the deposition temperature. Films deposited at high temperatures have much lower electrical conductivity but remarkably higher photosensitivity than those deposited at low temperatures. The deposition temperatures are found to affect the electrochemical properties, such as anodic photocurrent–potential characteristics and spectra dependence of anodic photocurrents. Some doping effects of Al, Cr and Fe on the both properties are also examined.

Journal ArticleDOI
TL;DR: In this paper, the effect of sampling interval length has on the chemical composition of wet-only deposition was evaluated using variance analysis and comparison of ion concentration ratios, and results from daily, weekly and biweekly intervals were evaluated.


Journal ArticleDOI
TL;DR: Excessive fat deposition in broilers, which reduces the profit margin for poultry processors and makes effluent disposal difficult, responds to dietary manipulation as mentioned in this paper, when the energy consumed by the...
Abstract: Excessive fat deposition in broilers, which reduces the profit margin for poultry processors and makes effluent disposal difficult, responds to dietary manipulation.When the energy consumed by the ...

ReportDOI
01 Jul 1982
TL;DR: Thesis: M.S., Massachusetts Institute of Technology, Department of Chemical Engineering, 1982 as mentioned in this paper, Section 5.1, Section 7, Section 3.2.1.
Abstract: Thesis: M.S., Massachusetts Institute of Technology, Department of Chemical Engineering, 1982

Journal ArticleDOI
TL;DR: In this article, the results were examined for any significant elevational effects and also compared with similar results from a site on the flat east coast of England, showing that the larger rainfall amounts in Wales led to a greater deposition of ions there.


Journal ArticleDOI
TL;DR: In this article, the deposition of an amorphous film of GaAs with a low frequency and low power glow discharge was described, and the structure and composition of the film were determined by IR, secondary ion mass spectrometry, electron paramagnetic resonance and electron diffraction measurements.