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Showing papers on "Silane published in 1973"



Journal ArticleDOI
TL;DR: In this paper, a simple model for current conduction in polycrystalline silicon is described based on grain size, grain doping, and effective barrier height due to the grain boundary, which satisfactorily explains the observed temperature dependence of the resistivity of undoped films and also the large values of resistivity which are observed for dopant concentrations.
Abstract: Polycrystalline silicon is deposited by pyrolysis of silane in an rf heated epitaxial reactor. The grains exhibit a fibrous microstructure having an 〈110〉 preferred orientation in the growth direction. Growth is inhibited in the presence of excess arsine and accelerated in the presence of diborane. The results are explained in terms of catalysis and poisoning of surface adsorption sites responsible for reaction. A simple model for current conduction in polycrystalline silicon is described based on grain size, grain doping, and effective barrier height due to the grain boundary. This model satisfactorily explains the observed temperature dependence of the resistivity of undoped films and also the large values of resistivity which are observed for dopant concentrations .

116 citations


Journal ArticleDOI
TL;DR: In this article, the influence of the deposition conditions on the structure of chemically deposited polycrystalline-silicon films has been examined, and it was shown that the grain size increases with increasing film thickness and deposition temperature, ranging from less than 0.05 microm to more than 1 microm.

90 citations


Journal ArticleDOI
TL;DR: In this paper, the authors investigated the reaction kinetics of the deposition of silica and phosphosilicate glasses and determined the parameters governing the rates of reactions, showing that the reactions obey the absolute rate theory of heterogeneous reactions at a solid surface.
Abstract: Investigations of the reaction kinetics of the deposition of silica and phosphosilicate glasses were made to determine the parameters governing the rates of reactions. Dependence of deposition rates on substrate temperature shows that the reactions obey the absolute rate theory of heterogeneous reactions at a solid surface. The silane oxidation reaction is of half‐order with respect to oxygen, of half‐order with respect to silane, and of first‐order over‐all. The phosphine oxidation reaction is of second‐order over‐all. The unusual decrease in deposition rate with increasing oxygen concentrations, during the oxidation of silane, has been shown to originate from the adsorption of oxygen on the silicon substrates, retarding the reaction.

51 citations


Patent
19 Dec 1973
TL;DR: In this paper, the authors present a method and means for depositing polycrystalline silicon from silane in a vacuum, where the deposition zone is profiled flat from a temperature point of view, the deposition rate over the length of the tube appears as a flattened curve.
Abstract: SYSTEM AND PROCESS FOR DEPOSITION OF POLYCRYSTALLINE SILICON WITH SILANE IN VACUUM ABSTRACT OF THE DISCLOSURE The present invention is directed to the method and means for depositing polycrystalline silicon from silane in a vacuum. This process contemplates the use of a gas source and a means for assuring a uniform flow of gas into the deposition chamber. The deposition chamber is a hot wall furnace. The deposition zone is kept at as uniform a tem-perature as possible. The preferred temperature is 600°Cwith a workable range extending from 600°C to 700°C. While the deposition zone is profiled flat from a temperature point of view, the deposition rate over the length of the tube appears as a flattened curve. This means that at the source and exhaust portions of the tube, the deposition rates are different from that rate in the central flattened portion. The boat upon which the wafers are placed is centered within the center portion of the curve along its flattest portion. Wafers are placed perpendicular to the gas flow with a preferred spacing approximately 50 mils on center when using wafers 20 mils thick. The wafers are placed in the tube from the source input end. At the gas exhaust end, intermediate the tube and the vacuum pump, is an optical baffle. The function of the optical baffle is to collect the undeposited silane material and silicon by-products which pass through the tube. The undeposited silane material appears in the form of a brown dust which is granular silicon and silicon monoxide. This granular material forms around the exit end of the tube and in the baffle.

47 citations


Journal ArticleDOI
J. Bloem1
TL;DR: In this paper, it was shown that the introduction of some HCl has the effect of suppressing the gas phase decomposition of SiH 4, so that growth rates up to 40 sm/min are possible.

44 citations



Patent
01 Oct 1973
TL;DR: In this paper, a spray-based spray-on paint film based on a thermo-setting resin which is applied on an aluminum article may be improved in its adhesion properties and resistance to chemical and mechanical attacks as well as in its resistance to weathering.
Abstract: A paint film based on a thermo-setting resin which is applied on an aluminum article may be improved in its adhesion properties and resistance to chemical and mechanical attacks as well as in its resistance to weathering, if the surface of the aluminum article is previously anodized to form the oxide surface layer or is treated in boiling water to form the boehmite surface layer and if the oxide surface layer, including the boehmite layer, is pre-treated with a silane compound prior to the application of the coating composition. The application of the paint composition is conducted in this invention by means of a known coating technique such as dipping, spraying, showering, brushing or roller-coating, other than the electro-deposition technique.

34 citations


Journal ArticleDOI
TL;DR: In this paper, a copolymer with dimethylsilane units alternating with dioxysilphenylene and diorganosilane units was investigated as a source of high-temperature elastomers for the aerospace industry.
Abstract: Copolymers with alternating dioxysilphenylene and diorganosilane units were investigated as a source of high-temperature elastomers for the aerospace industry. A copolymer with dimethylsilane units alternating with dioxysilphenylene had a glass transition temperature of −63°C and exceptional thermal stability; a polymer with diphenylsilane units alternating with dioxysilphenylene had a glass transition temperature of 0°C and slightly higher thermal stability. Both were cured to elastomers at room temperature with ethyl silicate in combination with dibutyltin diacetate. Both had tensile strengths (ultimate) above 4000 psi even without reinforcing fillers. Reinforced elastomers of the dimethyl copolymer had tensile strengths (ultimate) up to 16,000 psi.

33 citations


Patent
08 Nov 1973
TL;DR: In this paper, a method of providing an ohmic contact for a silicon semiconductor device, including a layer of tungsten or molybdenum on a polycrystalline silicon layer, is described.
Abstract: A method of providing an ohmic contact for a silicon semiconductor device, the ohmic contact including a layer of tungsten or molybdenum on a polycrystalline silicon layer, includes depositing these two layers consecutively in the same deposition apparatus, the polycrystalline layer being deposited from a silane atmosphere at 700* to 750*C and the metal layer being deposited when a vapour of a compound of the metal, such as the hexafluoride, is supplied to modify the deposition atmosphere, the compound being reduced by the silane.

33 citations


Patent
19 Nov 1973
TL;DR: In this paper, the authors present novel liquid toner compositions that are useful in copier duplicators, which are highly hydrophobic liquid toners for developing latent images and comprise pigment, dye, polymer and a silane treated fumed silica, the combination being suspended in a volatile isoparaffinic hydrocarbon vehicle.
Abstract: Disclosed herein are novel liquid toner compositions that are useful in copier duplicators. The toner compositions of the present invention are highly hydrophobic liquid toners for developing latent images and comprise pigment, dye, polymer and a silane treated fumed silica, the combination being suspended in a volatile isoparaffinic hydrocarbon vehicle.

Patent
26 Jan 1973
TL;DR: In this article, individual glass fibers are coated with a combined aqueous sizing and coating composition that includes a resorcinolformaldehyde resin solution admixed with a styrenebutadienevinylpyridine terpolymer latex.
Abstract: Individual glass fibers are coated with a combined aqueous sizing and coating composition that includes a resorcinolformaldehyde resin solution admixed with a styrenebutadienevinylpyridine terpolymer latex. A coupling agent containing a hydrolizable amino-functional silane, ammonia and an ammonia soluble carboxyl-containing polymer is admixed with the resin and latex to form an aqueous combined sizing and coating composition. The individual glass fibers are coated shortly after attenuation and thereafter are gathered into strands. The strands are dried while spaced from each other and then collected on a forming tube. The coated strands are used as glass fiber reinforcement for elastomeric products. The presence of the ammonia-soluble carboxylcontaining polymer in the coupling agent stabilizes the coupling agent so that the coupling agent does not cause precipitation of the resin-latex mixture when admixed therewith. The resin, latex and coupling agent can be applied as a combined sizing and coating in a one step coating process.

Journal ArticleDOI
TL;DR: In this paper, an endothermic ion-molecule reaction in silane is reported together with the rate constants for the observed reactions, and the mechanism and kinematics of fragmentation for the excited intermediate ion.
Abstract: Endothermic ion‐molecule reactions in silane are reported together with rate constants for the observed reactions. Si2+ is observed only from endothermic reactions of Si+ and SiH2+ with silane. Endothermic as well as exothermic channels are observed for the formation of Si2H+, Si2H2+, and Si2H3+. The kinetic energy dependence of reactions yielding Si2H+, Si2H2+, Si2H3+, and Si2H4+ products is reported and analyzed in terms of the mechanism and kinematics of fragmentation for the excited intermediate ion.

Journal ArticleDOI
TL;DR: In this paper, the synthesis of a series of methylseleno-derivatives of Group IV, Me4 -nM(SeMe)n(M = Si, Ge, or Sn, n= 1−4), is reported.
Abstract: The synthesis of a series of methylseleno-derivatives of Group IV, Me4 –nM(SeMe)n(M = Si, Ge, or Sn, n= 1–4), is reported. The preparative routes include reactions of methaneselenol with Group IV amines; the dehydrohalogenation of methaneselenol and a Group IV halide; and the reactions of Group IV halides with ‘methylselenolithium’, methylselenomagnesium iodide, lithium tetramethylselenoaluminate, and methylseleno(trimethyl)silane. The n.m.r. and vibrational spectra are reported and discussed. The reactions of the series Me3MSeMe with some protic reagents were studied.


Patent
25 Jun 1973
TL;DR: In this article, the authors describe a PIGMENTED WATER REPELLENT COMPOSITION (PWRC) consisting of an ORGANIC RESINOUS MATERIAL SELECTED from the class consisting of POLYMERS of ACRYLIC ACID, METHACRY LACIACID, SULFURIC ACIACI, ALKYL ESTERS OF ACI, and METH ACRIEOUS AQUEOUS Solution.
Abstract: 1. A PIGMENTED WATER REPELLENT COMPOSITION CONSISTING ESSENTIALLY OF A WATER-BASE PAINT COMPOSITION CONTAINING A PIGMENT, AN ORGANIC RESINOUS MATERIAL SELECTED FROM THE CLASS CONSISTING OF POLYMERS OF ACRYLIC ACID, METHACRYLIC ACID, ALKYL ESTERS OF ACRYLIC ACID, METHACRYLIC AQUEOUS SOLUTION CONTAINING FROM 20 TO 50 PERCENT BY WEIGHT OF A SILICONE RESIN BASED ON THE TOTAL WEIGHT OF THE SOLUTION, SAID SILICONE RESIN IS OBTAINED FROM THE REACTION OF FROM 1 TO 3 PARTS OF AN ALKYTRIALKOXYSILANE HAVING FROM 1 TO 6 CARBON ATOMS IN THE ALKYL GROUP WITH FROM 3 TO 1 PARTS OF AN ALKYL ORTHLTRIALKOXYSILANE HAVING FROM 1 TO 4 CARBON ATOMS IN EACH ALKYL GROUP AND WATER IN AN AMOUNT RANGING FROM 0.4 TO ABOUT 100 TIMES THE COMBINED VOLUME OF THE ALKYLTRIALKOXYSILANE AND THE ALKYL ORTHOSILICATE, AND AN ACID SELECTED FROM THE GROUP CONSISTING OF HYDROCHLORIC ACID, SULFURIC ACID, ETHYL HYDROGEN PHOSPHITE, DIETHYL HYDROGEN PHOSPHITE AND MIXTURES OF DIETHYL HYDROGEN PHOSPHITE AND PHOSPHOROUS ACID IN AN AMOUNT TO PROVIDE A PH OF FROM 2 TO 6, SAID WATER REPELLENT COMPOSITION CONTAINING FROM 2 TO 40 PERCENTT BY WEIGHT OF THE SILICONE RESIN BASED ON THE WEIGHT OF SAID COMPOSITION.

Patent
22 Jan 1973
TL;DR: Sizing of synthetic organic fibers with an aqueous mixture of a water dispersible salt of a copolymer of ethylene and one of acrylic or methacrylic acid and a hydrolyzable organo-functional silane to provide, after said fiber is dried, improved fiber abrasion resistance, lubricity, package release, gloss and the like as mentioned in this paper.
Abstract: Sizing of synthetic organic fibers with an aqueous mixture of a water dispersible salt of a copolymer of ethylene and one of acrylic or methacrylic acid and a hydrolyzable organo-functional silane to provide, after said fiber is dried, improved fiber abrasion resistance, lubricity, package release, gloss, and the like.

Patent
J Mohr1
02 Jan 1973
TL;DR: In this paper, the authors present an AQUEOUS GLASS SIZING COMPOSITION for FILAMENT GLASS FIBERS, which consists of ESSENTIALLY of 0.5 to 15 WEIGHT PERCENT of POLY(VINYL ACETATE); 0.1 TO 5 PERCENT OF a POLYETHYLENE GLYCOL HAVING A MOLECULAR WEIGHT IN the RANGE OF 200 TO 6000; 0.01 TO 0.6 WEIGHT PerCENT of a POLYESTER COMPATIBLE METHAC
Abstract: 1. AN AQUEOUS GLASS SIZING COMPOSITION FOR FILAMENT GLASS FIBERS WHICH CONSISTS ESSENTIALLY OF 0.5 TO 15 WEIGHT PERCENT OF POLY(VINYL ACETATE); 0.1 TO 5 PERCENT OF A POLYETHYLENE GLYCOL HAVING A MOLECULAR WEIGHT IN THE RANGE OF 200 TO 6000; 0.01 TO 0.6 WEIGHT PERCENT OF A POLYESTER COMPATIBLE METHACRYLIC SILANE; 0.01 TO 1.0 PERCENT OF A CATIONIC ALKYL AMIDE REACTION PRODUCT OF A C5 TO C20 ALKYL CARBOXYLIC ACID AND AN ETHYLENE AMINE, AND THE BALANCE DE-IONIZED WATER, THE COMPOSITION HAVING A PH OF NOT GREATER THAN 6 AND A SOLIDS CONTENT IN THE RANGE OF 1-22 PERCENT.


Patent
20 Mar 1973
TL;DR: A polyvinyl chloride composition consisting of 100 parts by weight of vinyl chloride resins, 1 to 15 parts of a finely divided silica having an average particle size of from 1 to 9 mu which is prepared by removing alumina component from montmorillonite type clay such as Japanese acid clay and bentonite through mineral acid and other additives as mentioned in this paper.
Abstract: A polyvinyl chloride composition consisting of 100 parts by weight of vinyl chloride resins, 1 to 15 parts by weight of a finely divided silica having an average particle size of from 1 to 9 mu which is prepared by removing alumina component from montmorillonite type clay such as Japanese acid clay and bentonite through mineral acid and other additives. The vinyl chloride resins includes polyvinyl chloride, copolymer of vinyl chloride and alpha , beta -ethylenically unsaturated monomer and mixture of polyvinyl chloride and other resins being compatible with polyvinyl chloride. As a finely divided silica, there may be also preferably employed one having a hydrophobic property which is prepared by further treating the above silica with a treating agent of silane type selected from the group consisting of alkylalkoxysilane and vinylalkoxysilane. The composition can give an unplasticized or plasticized article having an excellent electric insulation.

Journal ArticleDOI
TL;DR: In this paper, a mechanism for trisilane extraction from Si+ ions in recoil silicon studies is presented. But it is also reported that the addition of triethylamine to recoil silicon experiments results in a decrease in the absolute yield without affecting the yields of other products.
Abstract: Ion‐molecule reaction sequences in silane, producing tertiary product ions, are reported. A mechanism is presented by which trisilane can be producted from Si+ ions in recoil silicon studies. It is also reported that Si+ ions can be efficiently neutralized by charge exchange with triethylamine. Preliminary studies indicate that the addition of triethylamine to recoil silicon experiments results in a decrease in the absolute yield of trisilane without affecting the yields of other products. In addition, information obtained from ion‐molecule studies in silane is applied to radiolysis studies of silane. A mechanism is presented by which higher homologues are produced by hydride ion transfer.

Patent
Edward Charles Spaulding1
29 Jun 1973
TL;DR: Halogen substituted paraxylylene dimers with bifunctional silanes and vapor deposited on a substrate or used as an encapsulant produce dielectric films having improved adherence, resistance to electromigration, and thermal stability as mentioned in this paper.
Abstract: Halogen substituted paraxylylene dimers admixed with bifunctional silanes and vapor deposited on a substrate or used as an encapsulant produce dielectric films having improved adherence, resistance to electromigration, and thermal stability.


Journal ArticleDOI
TL;DR: In this paper, the authors show that Tungsten hexafluoride reacts with trimethylsilyldiethylamine or trimethyl(pentafluorsophenoxo)silane at or below ambient temperature with the replacement of F by either Nt2 or O6F5 groups.
Abstract: Tungsten hexafluoride reacts with trimethylsilyldiethylamine or trimethyl(pentafluorophenoxo)silane at or below ambient temperature with the replacement of F by –NEt2 or –OC6F5 groups. Compounds isolated were monomeric WF2(NEt2)4, polymeric WF4(NEt2)2 and monomeric WF5OC6F5. WF4(OC6F5)2 appears to exist in cis- and trans-forms and undergoes reorganisation to give other members of the series.


Patent
16 Jan 1973
TL;DR: METHYLVINYLDI-(N-METHYLACETAMIDO) SILANE is USEFUL AS A CHAIN EXTENDER in MAKING LOW MODULUS ROOM TEMPERATURE VULCANIZABLE SILICONE ELASTOMERS POSSESSING FAST CURE and ADHESION TO SUBSTRATES.
Abstract: METHYLVINYLDI-(-N-METHYLACETAMIDO) SILANE IS USEFUL AS A CHAIN EXTENDER IN MAKING LOW MODULUS ROOM TEMPERATURE VULCANIZABLE SILICONE ELASTOMERS POSSESSING FAST CURE AND ADHESION TO SUBSTRATES.

Patent
23 Aug 1973
TL;DR: In this article, a tertiary condensation product of phenol, formaldehyde and a silane containing an aromatic group substituted with oxygen is described, which can be cured with boron-containing material and is a suitable binder composition for glass fibers.
Abstract: A tertiary condensation product of phenol, formaldehyde and a silane containing an aromatic group substituted with oxygen is disclosed. The product can be cured with a boron-containing material and is a suitable binder composition for glass fibers.

Patent
26 Jul 1973
TL;DR: In this article, large pore silica gel is produced by reacting an alkyoxy or aryloxy silane with an alkali metal hydroxide and then contacting the reaction product with a mineral acid to form a hydrogel.
Abstract: Large pore silica gel is produced by reacting an alkyoxy or aryloxy silane with an alkali metal hydroxide and then contacting the reaction product with a mineral acid to form a hydrogel from which a xerogel can be produced.

Patent
01 Mar 1973
TL;DR: The use of peroxyorgano-substd silane dissolved in an org. solvent as the adhesion promoter for bonding (fluoro)silicones or fluoroelastomers to (non)-metallic substrates under vulcansn conditions is claimed as mentioned in this paper.
Abstract: The use of a peroxyorgano-substd silane dissolved in an org. solvent as the adhesion promoter for bonding (fluoro)silicones or fluoroelastomers to (non)-metallic substrates under vulcansn conditions is claimed. The prefd silane is of formula- RmR'(4-n-m) SI (OOR")n (where R is alkylene pref. vinyl or allyl; R' is (ar)alkyl (alk)aryl, alkoxy or carboxyl, R" is (alk)aryl or (ar) alkyl, pref. methyl propyl, or isopropylphenyl, m is 0 or 1 and n is 1-4) in amts of 0.1-15 wt.% (of solvent).

Patent
19 Dec 1973
TL;DR: The present discovery concerns new organosilanes which possess two silane groups, one of which is located at each end of a polymeric molecule as discussed by the authors, which are useful in improving the physical properties of synthetic thermoplastic materials which are based on formaldehyde or trioxane and inorganic solids.
Abstract: The present discovery concerns new organosilanes which possess two silane groups, one of which is located at each end of a polymeric molecule. These compounds are useful in improving the physical properties of synthetic thermoplastic materials which are based on formaldehyde or trioxane and inorganic solids.