An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

For 50 years the exponential rise in the power of electronics has been fuelled by an increase in the density of silicon complementary metal-oxide-semiconductor (CMOS) transistors and improvements to their logic performance. But silicon transistor scaling is now reaching its limits, threatening to end the microelectronics revolution. Attention is turning to a family of materials that is well placed to address this problem: group III-V compound semiconductors. The outstanding electron transport properties of these materials might be central to the development of the first nanometre-scale logic transistors.

Nanometre-scale electronics with III–V compound semiconductors

A diverse spectrum of technology drivers such as improved thermal barriers, higher efficiency thermoelectric energy conversion, phase-change memory, heat-assisted magnetic recording, thermal management of nanoscale electronics, and nanoparticles for thermal medical therapies are motivating studies of the applied physics of thermal transport at the nanoscale. This review emphasizes developments in experiment, theory, and computation in the past ten years and summarizes the present status of the field. Interfaces become increasingly important on small length scales. Research during the past decade has extended studies of interfaces between simple metals and inorganic crystals to interfaces with molecular materials and liquids with systematic control of interface chemistry and physics. At separations on the order of ∼1 nm, the science of radiative transport through nanoscale gaps overlaps with thermal conduction by the coupling of electronic and vibrational excitations across weakly bonded or rough interface...

/pdf/nanoscale-thermal-transport-ii-2003-2012-4upcs4bq86.pdf

Nanoscale thermal transport. II. 2003–2012

Enhancement mode, field effect transistors wherein at least a portion of the transistor structure may be substantially transparent. One variant of the transistor includes a channel layer comprising a substantially insulating, substantially transparent, material selected from ZnO, Sn02, or In203. A gate insulator layer comprising a substantially transparent material is located adjacent to the channel layer so as to define a channel layer/gate insulator layer interface. A second variant of the transistor includes a channel layer comprising a substantially transparent material selected from substantially insulating ZnO, Sn02or In2O3, the substantially insulating ZnO, Sn02, or In203 being produced by annealing. Devices that include the transistors and methods for making the transistors are also disclosed.

Transistor structures and methods for making the same

Scaling of silicon (Si) transistors is predicted to fail below 5-nanometer (nm) gate lengths because of severe short channel effects. As an alternative to Si, certain layered semiconductors are attractive for their atomically uniform thickness down to a monolayer, lower dielectric constants, larger band gaps, and heavier carrier effective mass. Here, we demonstrate molybdenum disulfide (MoS2) transistors with a 1-nm physical gate length using a single-walled carbon nanotube as the gate electrode. These ultrashort devices exhibit excellent switching characteristics with near ideal subthreshold swing of ~65 millivolts per decade and an On/Off current ratio of ~106 Simulations show an effective channel length of ~3.9 nm in the Off state and ~1 nm in the On state.

/pdf/mos2-transistors-with-1-nanometer-gate-lengths-389j9ig3a6.pdf

MoS2 transistors with 1-nanometer gate lengths

In one embodiment of the invention, a non-planar transistor includes a gate electrode and multiple fins. A trench contact is coupled to the fins. The contact bottom is formed above the substrate and does not directly contact the substrate. The contact bottom is higher than the gate top.

Semiconductor device with reduced fringe capacitance

A nanowire device of the invention can be produced with following method of the incorporation of at least one hard mask during the fabrication of at least one nanowire transistor in order to assist inprotecting an uppermost channel nanowire against damage that may result from fabrication processes, such as those used in a replacement metal gate process and/or the nanowire release process. The useof the at least one hard mask may result in a substantially damage-free uppermost channel nanowire in the multi-stacked nanowire transistors, which may improve the uniformity of the channel nanowiresand the reliability of the overall multi-stacked nanowire transistors.

Fabrication of nanowire transistors using hard mask layer

Techniques and mechanisms for providing data to be used in an in-memory computation at a memory device. In an embodiment a memory device comprises a first memory array and circuitry, coupled to the first memory array, to perform a data computation based on data stored at the first memory array. Prior to the computation, the first memory array receives the data from a second memory array of the memory device. The second memory array extends horizontally in parallel with, but is offset vertically from, the first memory array. In another embodiment, a single integrated circuit die includes both the first memory array and the second memory array.

Memory device with multiple memory arrays to facilitate in-memory computation

A two transistor memory cell is described that uses high mobility amorphous oxide semiconductors. In one example, a sensing transistor has a source and a drain in a first metal layer and a gate between the source and the drain. The gate has a channel formed of a metal oxide semiconductor. A charging transistor has a source and a drain in a second metal layer and a gate channel also formed of metal oxide semiconductor, wherein the source of the charging transistor is coupled to the gate of the sensing transistor, and a gate electrode in a third metal layer is coupled to the gate of the charging transistor.

Two transistor memory cell using high mobility metal oxide semiconductors

Described herein are arrays of embedded dynamic random-access memory (eDRAM) cells that use TFTs as selector transistors. When at least some selector transistors are implemented as TFTs, different eDRAM cells may be provided in different layers above a substrate, enabling a stacked architecture. An example stacked TFT based eDRAM includes one or more memory cells provided in a first layer over a substrate and one or more memory cells provided in a second layer, above the first layer, where at least the memory cells in the second layer, but preferably the memory cells in both the first and second layers, use TFTs as selector transistors. Stacked TFT based eDRAM allows increasing density of memory cells in a memory array having a given footprint area, or, conversely, reducing the footprint area of the memory array with a given memory cell density.

Jack T. Kavalieros

Papers

Semiconductor device with reduced fringe capacitance

Fabrication of nanowire transistors using hard mask layer

Memory device with multiple memory arrays to facilitate in-memory computation

Two transistor memory cell using high mobility metal oxide semiconductors

Stacked thin-film transistor based embedded dynamic random-access memory