P
Paul S. Ho
Researcher at University of Texas at Austin
Publications - 481
Citations - 14016
Paul S. Ho is an academic researcher from University of Texas at Austin. The author has contributed to research in topics: Electromigration & Dielectric. The author has an hindex of 60, co-authored 475 publications receiving 13444 citations. Previous affiliations of Paul S. Ho include National Institute of Standards and Technology & IBM.
Papers
More filters
Patent
Method of production of thin conducting metal strips on semiconductor substrates and strips produced by this method
TL;DR: In this paper, gold and at least one metal (Zr, Nb, and/or Hf) are deposited on the substrate, followed by heating at 200-500 degrees C., pref. (a,b) is then used to form the conductor strip.
Journal ArticleDOI
Line width dependence of stress relaxation and yield behavior of passivated Al(Cu) lines
TL;DR: In this paper, bending beam measurements have been carried out to measure the thermal stress and stress relaxation behavior of passivated Al(1 wt.% Cu) line structures with 3, 1, and 0.5 fim line widths.
Proceedings ArticleDOI
Advanced Preclean for Integration of PECVD SiOCH (k=2.5) Dielectrics with Copper Metallization Beyond 45nm Technology
TL;DR: In this paper, an advanced preclean (APC) technology has been developed and characterized using PECVD SiOCH (k=2.5) dielectrics, which minimizes plasma damage, causing no measurable k increase and having the lowest impact to other properties of the low k film.
Proceedings ArticleDOI
Plasma altered layer model for plasma damage characterization of porous OSG films
Hualiang Shi,Huai Huang,J. Bao,Jang-Hi Im,Paul S. Ho,Yifeng Zhou,Jeremiah T. Pender,Michael D. Armacost,David F. Kyser +8 more
TL;DR: In this article, a plasma altered layer model was developed to characterize plasma damage in porous OSG (organosilicate glass) low-k dielectrics by taking into account the kinetics of radical diffusion, reaction, and recombination.
Proceedings ArticleDOI
Stressmigration studies on dual damascene Cu/oxide and Cu/low k interconnects
TL;DR: In this paper, a dual damascene Cu/oxide and Cu/low k interconnects over a temperature range of 140 ∼ 350 °C were studied and two modes of stressmigration were observed depending on the baking temperature and sample geometry.