P
Paul S. Ho
Researcher at University of Texas at Austin
Publications - 481
Citations - 14016
Paul S. Ho is an academic researcher from University of Texas at Austin. The author has contributed to research in topics: Electromigration & Dielectric. The author has an hindex of 60, co-authored 475 publications receiving 13444 citations. Previous affiliations of Paul S. Ho include National Institute of Standards and Technology & IBM.
Papers
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Proceedings ArticleDOI
Minimization of plasma ashing damage to OSG low-k dielectrics
Hualiang Shi,Huai Huang,Jang-Hi Im,Paul S. Ho,Yifeng Zhou,Jeremiah T. Pender,Michael D. Armacost,David F. Kyser +7 more
TL;DR: In this article, the authors investigated the plasma ashing damage to patterned porous low k structures with the objective to minimize the plasma damage by optimizing the low-k structural geometry and plasma chemistry.
Proceedings ArticleDOI
Microstructure Evolution and Effect on Resistivity for Cu Nanointerconnects and Beyond
TL;DR: In this paper, the scaling effect on microstructure of Cu interconnects was analyzed to the 24 nm linewidth for the 14 nm node using a high-resolution TEM precession microdiffraction technique.
Proceedings ArticleDOI
Grain structure analysis and implications on electromigration reliability for Cu interconnects
TL;DR: In this paper, a precession electron diffraction (PED) technique in transmission electron microscopy (TEM) was employed to characterize the grain orientation and grain boundaries for Cu interconnects of the 45 nm node.
Journal ArticleDOI
Forward to the Special Section on “Materials, Processing, and Reliability of 3-D Interconnects”
TL;DR: In this paper, materials, processing, and reliability of 3D interconnects are discussed. But the focus of this special section is on 3D-interconnects with respect to materials and processing.
Journal ArticleDOI
Interfacial Adhesion Study of Porous Low-K Dielectrics to CVD Barrier Layers
TL;DR: In this paper, the four-point bending technique employed at The University of Texas at Austin (UT Austin) to characterize adhesion strength of ultra low-k dielectric materials to CVD barrier layers was discussed.