Y
Youdou Zheng
Researcher at Nanjing University
Publications - 557
Citations - 7057
Youdou Zheng is an academic researcher from Nanjing University. The author has contributed to research in topics: Chemical vapor deposition & Photoluminescence. The author has an hindex of 31, co-authored 493 publications receiving 5015 citations. Previous affiliations of Youdou Zheng include Xiamen University.
Papers
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Journal ArticleDOI
Suppression and compensation effect of oxygen on heavily boron doping behavior in diamond films
Licai Hao,Ziwen Chen,Dongyang Liu,Weikang Zhao,Ming-xin Zhang,Kun Tang,Shunming Zhu,Jiandong Ye,Rong-Ping Zhang,Youdou Zheng,S. Guo +10 more
TL;DR: In this paper , the suppression and compensation effect of oxygen on heavily boron doping behaviors and characteristics in microwave plasma chemical vapor deposition (MPCVD) diamond films are investigated.
Patent
Method for removing burrs of battery electrode plates by inductively coupled plasma dry etching
Rong Zhang,Ting Zhi,Tao Tao,Zhili Xie,Zhiguo Yu,Liu Bin,Peng Chen,Xiangqian Xiu,Yi Li,Ping Han,Yi Shi,Youdou Zheng +11 more
TL;DR: In this article, a method for removing burrs of battery electrode plates using inductively coupled plasma (ICP) dry etching, in which an induction coil is used for ionizing reaction gas.
Journal ArticleDOI
Low Leakage Current and High Breakdown Field AlGaN/GaN MIS-HEMTs Using PECVD-SiNx as a Gate Dielectric
Xiao-Jun Gao,Hui Guo,Rui Wang,Danfeng Pan,Peng Chen Chen,Dunjun Chen,Haixia Liu,Rong Zhang,Youdou Zheng +8 more
TL;DR: In this article , SiNx film deposited by plasmaenhanced chemical vapor deposition was employed as a gate dielectric of AlGaN/GaN high electron mobility transistors (HEMTs).
Journal ArticleDOI
The Growth and In-Situ Doping of SiGe/Si Strained Heterostructures by RTP/VLP-CVD
Shulin Gu,Youdou Zheng,Rong Zhang,Ronghua Wang,Ping Han,Xiaodong Huang,Peixing Zhong,Liqun Hu,S.N. Zhu,J.N. Chen +9 more
TL;DR: SiH4 and GeH4 Deposition and In-Situ Doping of SiGe/Si Strained Heterostructures by Rapid Thermal Process Very Low Pressure Chemical Vapor Deposition method have been studied in this article.
Journal ArticleDOI
High-Voltage β-Ga2O3 RF MOSFETs With a Shallowly-Implanted 2DEG-Like Channel
Xinxin Yu,Hehe Gong,Jianjun Zhou,Zhen-zhong Shen,Wenhui Xu,Tiangui You,Jian Wang,Shengnan Zhang,Ran Tao,Yun Wu,Fang-Fang Ren,Xin Ou,Yuechan Kong,Zhonghui Li,Tangsheng Chen,Dunjun Chen,S. Guo,Youdou Zheng,Jiandong Ye,Rong Zhang +19 more
TL;DR: In this paper , the authors report radio-frequency (RF) MOSFETs with a 2DEG-like channel formed at the Si surface through the low-energy implantation of Si and rapid thermal activation process.