Journal ArticleDOI
A differential laser Doppler system for one-dimensional in-plane motion measurement of MEMS
TLDR
In this paper, the authors used the differential laser Doppler technique to measure one-dimensional in-plane motions in micro-electro-mechanical systems and derived the displacement from the integral of velocity.About:
This article is published in Measurement.The article was published on 2007-07-01. It has received 30 citations till now. The article focuses on the topics: Laser Doppler vibrometer & Displacement (vector).read more
Citations
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Emerging Challenges of Microactuators for Nanoscale Positioning, Assembly, and
TL;DR: A summary of the state-of-the-art in the design, fabrication, and application of microactuators for nanoscale manufacturing and assembly can be found in this paper.
Journal ArticleDOI
Emerging challenges of microactuators for nanoscale positioning, assembly, and manipulation
TL;DR: The results demonstrate the limitations of existing microactuator designs and key challenges associated with their design, modeling, and performance characterization for nanoscale positioning, assembly, and manipulation.
Journal ArticleDOI
Nanoscale displacement measurement of electrostatically actuated micro-devices using optical microscopy and digital image correlation
TL;DR: In this article, optical images of an electrostatically actuated micro electromechanical system (MEMS) device were processed using a modified drift corrected DIC (DC-DIC) algorithm and the results were analyzed.
Journal ArticleDOI
A review of MEMS inertial switches
Yun Cao,Zhanwen Xi +1 more
TL;DR: A comprehensive survey of the design schemes, performance aspects and dynamic test methods of the MEMS inertial switches is provided to aid in the development of the future research in this field.
Journal ArticleDOI
Nanoscale displacement measurement of microdevices via interpolation-based edge tracking of optical images
TL;DR: In this article, an interpolation-based edge tracking algorithm was proposed to measure nanoscale displacements of microdevices, and further enhance its ability to reject noisy signals using averaging of multiple image frames.
References
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Journal ArticleDOI
Stroboscopic interferometer system for dynamic MEMS characterization
TL;DR: In this paper, a computer-controlled stroboscopic phase-shifting interferometer system for measuring out-of-plane motions and deformations of MEMS structures with nanometer accuracy is described.
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3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope
TL;DR: In this article, it is demonstrated that time-resolved measurements up to 800 kHz can be performed with a lateral resolution in the micrometer range and a vibration amplitude detection limit of 3-5nm.
Journal ArticleDOI
A system for the dynamic characterization of microstructures
TL;DR: In this article, a fully automated measurement system designed to evaluate the dynamic characteristics of micromechanical structures (millimeter dimensions) has been presented to validate the system, vibration measurements have been carried on two structures-a micromachined silicon cantilever and bridge-and the results are presented.
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Measurement system for full three-dimensional motion characterization of MEMS
TL;DR: In this paper, a measurement system capable of stroboscopic imaging, interferometry, and digital image processing is presented for mechanically testing microelectromechanical systems (MEMS).
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Laser Doppler velocimeter for velocity and length measurements of moving surfaces
TL;DR: An industrial laser Doppler velocimeter has been developed for accurately measuring the velocity and length of moving surfaces and provides a large depth of field, high SNR, and large dynamic range making it very suitable to industrial process control applications.