Journal ArticleDOI
3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope
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TLDR
In this article, it is demonstrated that time-resolved measurements up to 800 kHz can be performed with a lateral resolution in the micrometer range and a vibration amplitude detection limit of 3-5nm.About:
This article is published in Optics and Lasers in Engineering.The article was published on 2001-08-01. It has received 151 citations till now. The article focuses on the topics: Vibration & Laser Doppler vibrometer.read more
Citations
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Journal Article
Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
TL;DR: In this article, a fast Fourier transform method of topography and interferometry is proposed to discriminate between elevation and depression of the object or wave-front form, which has not been possible by the fringe-contour generation techniques.
Journal ArticleDOI
Dynamic 3-D shape measurement method: A review
Xianyu Su,Qican Zhang +1 more
TL;DR: The basic principles and typical applications of this technique based on grating projected and fringe analysis, which attracts the attention and research effort in the past ten years, has been targeted as main objective to review.
Journal ArticleDOI
Piezoelectric micromachined ultrasonic transducers based on PZT thin films
Paul Muralt,Nicolas Ledermann,J. Paborowski,A. Barzegar,S. Gentil,B. Belgacem,Sylvain Petitgrand,Alain Bosseboeuf,Nava Setter +8 more
TL;DR: In this article, fabrication arid characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-spl mu/m-thick Pb(Zr/sub 0.53/Ti/sub 3/) (PZT) thin films are described.
Journal ArticleDOI
Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends
TL;DR: Optical techniques for ex situ characterization of static displacements, motions, vibrations and internal strain of micromechanical devices and M(O)EMS are critically reviewed in this paper, where their performances and limitations are analysed and improvements which were proposed recently and which are still needed are discussed.
Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
TL;DR: In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.
References
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Journal Article
Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
TL;DR: In this article, a fast Fourier transform method of topography and interferometry is proposed to discriminate between elevation and depression of the object or wave-front form, which has not been possible by the fringe-contour generation techniques.
Journal ArticleDOI
Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
TL;DR: In this paper, a fast Fourier transform method of topography and interferometry is proposed to discriminate between elevation and depression of the object or wave-front form, which has not been possible by the fringe-contour generation techniques.
Journal ArticleDOI
Fourier transform profilometry for the automatic measurement of 3-D object shapes
Mitsuo Takeda,Kazuhiro Mutoh +1 more
TL;DR: A new computer-based technique for automatic 3-D shape measurement is proposed and verified by experiments that has a much higher sensitivity than the conventional moire technique and is capable of fully automatic distinction between a depression and an elevation on the object surface.
Book
Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software
Dennis C. Ghiglia,Mark D. Pritt +1 more
TL;DR: Methods for Phase Unwrapping, Phase Data, Quality Maps, Masks, and Filters, and Minimum-Norm Methods.