A fast prototyping process for fabrication of microfluidic systems on soda-lime glass

TLDR: In this article, a microfluidic channel with a depth of 35.95±0.39 µm is formed after 40 min buffered oxide etching in an ultrasonic bath.

Abstract: This paper describes a fast, low-cost but reliable process for the fabrication of microfluidic systems on soda-lime glass substrates. Instead of using an expensive metal or polisilicon/nitride layer as an etch mask, a thin layer of AZ 4620 positive photoresist (PR) is used for buffered oxide etching (BOE) of soda-lime glass. A novel two-step baking process prolongs the survival time of the PR mask in the etchant, which avoids serious peeling problems of the PR. A new process to remove precipitated particles generated during the etching process is also reported in which the glass substrate is dipped into a 1 M hydrochloride solution. A microfluidic channel with a depth of 35.95±0.39 µm is formed after 40 min BOE in an ultrasonic bath. The resulting channel has a smooth profile with a surface roughness of less than 45.95±7.96 A. Glass chips with microfluidic channels are then bonded at 580 °C for 20 min to seal the channel while a slight pressure is applied. A new bonding process has been developed such that the whole process can be finished within 10 h. To our knowledge, this is the shortest processing time that has ever been reported. In the present study, an innovative microfluidic device, a `micro flow-through sampling chip', has been demonstrated using the fabrication method. Successful sampling and separation of Cy5-labelled bovine serum albumin (BSA) and anti-BSA has been achieved. This simple fabrication process is suitable for fast prototyping and mass production of microfluidic systems.