Proceedings ArticleDOI
An ultrasensitive chemical microsensor based on self-aligned dry-patterned environmentally sensitive hydrogels
Ming Lei,Woohyek Choi,Ronald A. Siegel,Babak Ziaie,Babak Ziaie +4 more
- Vol. 2, pp 1824-1827
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TLDR
In this article, a single-mask dry-etching technique was used to pattern two kinds of hydrogels (pH and glucose sensitive) underneath the cantilever beam without requiring any alignment (self-aligned) and photoinitiators.Abstract:
In this paper, we report on the fabrication and testing of an ultrasensitive chemical microsensor based on an environmentally sensitive hydrogel actuated cantilever beam. A single-mask dry-etching technique was used to pattern two kinds of hydrogels (pH and glucose sensitive) underneath the beam without requiring any alignment (self-aligned) and photoinitiators. The hydrogels swell in response to an increase in the pH or glucose concentration, thereby deflecting the microcantilevers by pushing it up. Typical sensitivities for a sensor having dimensions of 500 /spl times/ 20 /spl times/ 2 /spl mu/m/sup 3/ were measured to be /spl sim/7.2 /spl mu/m/pH units and 0.1 /spl mu/m/mM of glucose concentration. First order swelling pressures of 2550 and 1580 Pa were also calculated from the deflection measurements. Extreme extrapolated sensitivities of 1 nm/1.4 /spl times/ 10/sup -4/ pH unit and 1 nm/0.01 mM of glucose concentration can be achieved using an optical lever detection method similar to the ones employed in the AFMs (resolution of 1 nm). The measured response times for these sensors were several seconds (typically < 10 s).read more
Citations
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Journal ArticleDOI
A Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and Its Wireless Telemetry Application
TL;DR: A micromachined capacitive pressure sensor intended for applications that require mechanical robustness and measured to match a theoretical estimation of sensitivity at room temperature and over a dynamic range of 340 KPa.
Proceedings ArticleDOI
Multi-material additive manufacturing of robot components with integrated sensor arrays
TL;DR: Preliminary results for printing polymers and conductive material simultaneously to form small sensor arrays are presented and approaches to optimizing sensor performance are discussed.
Patent
Hydrogel based sensor probe for detecting an environmental state
TL;DR: In this article, a sensor probe (100,110,120,130,140,150,150) for detecting an environmental state within a bodily lumen is presented. But the sensor probe is not suitable for the detection of environmental changes.
References
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David J. Beebe,Jeffrey S. Moore,Joseph M. Bauer,Qing Yu,Robin H. Liu,Chelladurai Devadoss,Byung Ho Jo +6 more
TL;DR: The fabrication of active hydrogel components inside microchannels via direct photopatterning of a liquid phase greatly simplifies system construction and assembly as the functional components are fabricated in situ, and the stimuli-responsive hydrogels components perform both sensing and actuation functions.
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Fabrication of poly(ethylene glycol) hydrogel microstructures using photolithography
Alexander Revzin,Ryan J. Russell,Vamsi K. Yadavalli,Won Gun Koh,Curt Deister,David D. Hile,Michael B. Mellott,Michael V. Pishko +7 more
TL;DR: Three-dimensional, cross-linked PEG hydrogel microstructures were immobilized on the surface and changes in fluorescence were also observed for immobilized fluorophore labeled acetylcholine esterase upon the addition of acetyl acholine.
Journal ArticleDOI
Responsive biomimetic hydrogel valve for microfluidics
TL;DR: A biomimetic hydrogel valve capable of directional flow control in response to the local fluid environment in microfluidic channels is described, allowing fluid flow in one direction under forward pressure while restricting flow in the opposite direction.
Journal ArticleDOI
Ultrasensitive Biomems Sensors Based on Microcantilevers Patterned with Environmentally Responsive Hydrogels
TL;DR: In this paper, an innovative platform was developed for ultrasensitive microsensors based on microcantilevers patterned with crosslinked copolymeric hydrogels, after which a novel UV free-radical photolithography process was utilized to precisely align and pattern environmentally responsive hydrogel onto silicon microcants.
Journal ArticleDOI
A hydrogel-actuated environmentally sensitive microvalve for active flow control
TL;DR: In this article, a hydrogel-actuated microvalve is used to respond to changes in the concentration of specific chemical species in an external liquid environment. But the response time was only 7 min for a pH concentration cycle.
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