Journal ArticleDOI
Analysis of Frequency Locking in Optically Driven MEMS Resonators
Manoj Pandey,Keith L. Aubin,Maxim Zalalutdinov,Robert B. Reichenbach,Alan T. Zehnder,Richard H. Rand,Harold G. Craighead +6 more
TLDR
In this article, a thermomechanical model of the system is developed and its predictions explored to explain and predict the entrainment phenomenon, and the validity of the model is demonstrated by the good agreement between the predicted and experimental results.Abstract:
Thin, planar, radio frequency microelectromechanical systems (MEMS) resonators have been shown to self-oscillate in the absence of external forcing when illuminated by a direct current (dc) laser of sufficient amplitude. In the presence of external forcing of sufficient strength and close enough in frequency to that of the unforced oscillation, the device will become frequency locked, or entrained, by the forcing. In other words, it will vibrate at the frequency of the external forcing. Experimental results demonstrating entrainment for a disk-shaped oscillator under optical and mechanical excitation are reviewed. A thermomechanical model of the system is developed and its predictions explored to explain and predict the entrainment phenomenon. The validity of the model is demonstrated by the good agreement between the predicted and experimental results. The model equations could also be used to analyze MEMS limit-cycle oscillators designed to achieve specific performance objectivesread more
Citations
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Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Proceedings ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Effective quality factor tuning mechanisms in micromechanical resonators
James M. L. Miller,Azadeh Ansari,David B. Heinz,Yunhan Chen,Ian B. Flader,Dongsuk D. Shin,L. Guillermo Villanueva,Thomas W. Kenny +7 more
TL;DR: In this article, the effect of parametric pumping and thermal-piezoresistive pumping on the quality factor of a micro-and nano-electromechanical (MEM/NEM) resonator was investigated.
Journal ArticleDOI
Frequency locking in a forced Mathieu–van der Pol–Duffing system
TL;DR: Aubin et al. as discussed by the authors investigated the dynamics of a Mathieu-van der Pol-Duffing equation, which is forced both parametrically and nonparametrically.
References
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Scanning Force Microscopy: With Applications To Electric, Magnetic, And Atomic Forces
TL;DR: In this article, the authors discuss the properties of levers and noise sources in magnetic force microscopy and demonstrate that they can be used to detect magnetic force and magnetic force in the presence of magnetic force.
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Daniel Rugar,Peter Grutter +1 more
TL;DR: A mechanical degenerate parametric amplifier has been devised which greatly increases the motional response of a microcantilever for small harmonic force excitations and can improve force detection sensitivity for measurements dominated by sensor noise or backaction effects.
Journal ArticleDOI
Five parametric resonances in a microelectromechanical system
Kimberly L. Turner,Scott A. Miller,Scott A. Miller,Peter G. Hartwell,Noel C. MacDonald,Steven H. Strogatz,Scott G. Adams +6 more
TL;DR: In this article, the authors report parametrically excited torsional oscillations in a single-crystal silicon microelectromechanical system, which can provide a unique testing ground for dynamical phenomena that are difficult to detect in macroscopic systems.
Journal ArticleDOI
Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor
TL;DR: In this article, the effects of nonlinearity on the behavior of parametric resonance of a micro-machined oscillator were investigated. And the authors showed that the nonlinearities (electrostatic and mechanical) have a large impact on the dynamic response of the structure.