Patent
Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications thereof
Qing Ma,Andrew Berlin +1 more
TLDR
In this article, a method for varying the resonance frequency of a resonator beam is described, where the resonator is suspended above a substrate by the first end and the second end.Abstract:
A method for varying the resonance frequency of a resonator beam is disclosed. The method comprises first manufacturing a resonator beam having a first end and a second end. The resonator beam is suspended above a substrate by the first end and the second end. At least one end of the resonator beam is connected to an actuator that applies an actuation force to the resonator beam to apply tensile strain or compressive strain onto said resonator beam. By varying the amount of actuation force, the resonance frequency of the resonator beam may be tuned. Additionally, by varying the magnitude and direction of the actuation force, the resonator beam may be used as a temperature sensor or a temperature compensated resonator.read more
Citations
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Patent
Frequency and/or phase compensated microelectromechanical oscillator
Aaron Partridge,Markus Lutz +1 more
TL;DR: In this article, a compensated microelectromechanical oscillator is used to generate an output signal having second frequency. But the frequency of the output signal is dependent on the operating temperature of the resonator and/or manufacturing variations of it.
Patent
Temperature controlled MEMS resonator and method for controlling resonator frequency
Markus Lutz,Aaron Partridge +1 more
TL;DR: In this article, a temperature compensated microelectromechanical resonator is described and illustrated, and the present invention is directed to fabricating, manufacturing, providing and/or controlling a temperature-compensated resonator with mechanical structures that are encapsulated using thin film or wafer level encapsulation techniques.
Patent
Temperature compensation for silicon MEMS resonator
Markus Lutz,Aaron Partridge +1 more
TL;DR: In this article, various composition materials may be selected according to their thermal expansion coefficient and used to form resonator components on a substrate, when exposed to temperature variations, the relative expansion of these composition materials creates a compensating stiffness, or a compressive/tensile strain.
Patent
Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same
TL;DR: In this paper, the authors describe methods for use with and/or for fabricating MEMS, that supply, store, and trap charge on a mechanical structure disposed in a chamber.
Patent
Mechanical resonating structures including a temperature compensation structure
TL;DR: In this article, the mechanical resonating structures may have a compensating structure for compensating temperature variations, as well as related devices and methods, and the mechanical resonance structures are described.
References
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Patent
Laterally driven resonant microstructures
William C. Tang,Roger T. Howe +1 more
TL;DR: In this article, a microbridge device for use as a sensor or an actuator is driven parallel to a substrate as a resonant microstructure, which comprises a stationary thin-film electrode secured to the substrate and located in a plane above it.
Patent
Q-controlled microresonators and tunable electronic filters using such resonators
Clark T.-C. Nguyen,Roger T. Howe +1 more
TL;DR: In this paper, the authors present a system with controlled quality factors including a resonator having a plurality of ports and a first quality factor greater than the system quality factor, and an amplifier providing negative feedback among the ports to render the system's quality factor independent of the resonator quality factor.
Journal ArticleDOI
Independent tuning of linear and nonlinear stiffness coefficients [actuators]
TL;DR: In this paper, a combination of electrostatic actuators is used to tune the linear and nonlinear stiffness coefficients of a uniaxial micromechanical device without affecting the resonant frequency or the linear stiffness.
Patent
Microelectromechanical signal processors
TL;DR: In this article, a real-time spectrum analyzer using many micromechanical resonators was constructed using a very large scale integrated circuit microfabrication technique, where the input and output transducers are interdigitated comb electrodes.
Patent
Microelectromechanical ratcheting apparatus
TL;DR: In this article, a microelectromechanical (MEM) ratcheting apparatus is described which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack.