Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films

TLDR: In this paper, the d31 coefficient of a number of sputtered lead zirconate titanate (PZT) thin films with thicknesses between 0.6 and 3 μm was analyzed.

Abstract: The wafer flexure technique was used to characterize the d31 coefficient of a number of sol–gel and radio frequency (rf) sputtered lead zirconate titanate (PZT) thin films with thicknesses between 0.6 and 3 μm. Typical d31 values for well-poled 52/48 sol–gel films were found to be between −50 and −60 pC/N. The rf sputtered films possessed large as-deposited polarizations which produced d31 coefficients on the order of −70 pC/N in some unpoled films. The subsequent poling of the material, in a direction parallel to the preferred direction increased the d31 coefficient to values of about −85 pC/N. The aging behavior of the d31 coefficient was also investigated. For sol–gel films the aging rate was found to be independent of poling direction and to range from 4% per decade for a 2.5 μm film to 8% per decade for a 0.6 μm film. In contrast, the aging rate of sputtered films was strongly dependent on poling direction, with maximum and minimum rates of 26% and 2% per decade recorded. These aging rates are very h...