Journal ArticleDOI
Crystallization process and electro-optical properties of In2O3 and ITO thin films
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TLDR
Amorphous indium oxide and 10-wt% SnO2 doped In2O3 (ITO) thin films were prepared by pulsed-laser deposition.Abstract:
Amorphous indium oxide (In2O3) and 10-wt% SnO2 doped In2O3 (ITO) thin films were prepared by pulsed-laser deposition. These films were crystallized upon heating in vacuum at an effective heating rate of 0.00847 °C/s, while the evolution of the structure was observed by in situ X-ray diffraction measurements. Fast crystallization of the films is observed in the temperature ranges 165–210 °C and 185–230 °C for the In2O3 and ITO films, respectively. The crystallization kinetics is described by a reaction equation, with activation energies of 2.31 ± 0.06 eV and 2.41 eV and order of reactions of 0.75 ± 0.07 and 0.75 for the In2O3 and ITO films, respectively. The structures of the films observed here during heating are compared with those obtained upon film growth at different temperatures. The resistivity of the films depends on the evolution of the structure, the oxygen content and the activation of tin dopants in the films. A low resistivity of 5.5 × 10−4 Ω cm was obtained for the In2O3 and ITO films at room temperature, after annealing to 250 °C the resistivity of the ITO film reduces to 1.2 × 10−4 Ω cm.read more
Citations
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Journal ArticleDOI
Solution Combustion Synthesis of Nanoscale Materials
TL;DR: This Review focuses on the analysis of new approaches and results in the field of solution combustion synthesis (SCS) obtained during recent years, emphasizing the chemical mechanisms that are responsible for rapid self-sustained combustion reactions.
Journal ArticleDOI
Transparent Conducting Oxides in the ZnO-In2O3-SnO2 System
TL;DR: The bulk subsolidus phase diagram can be used as a guide to understand the numerous and varied results reported for thin films as discussed by the authors, as well as the electrical and optical properties of various ZITO compositions.
Journal ArticleDOI
Ellipsometry investigation of the effects of annealing temperature on the optical properties of indium tin oxide thin films studied by Drude–Lorentz model
S. D’Elia,Nicola Scaramuzza,Federica Ciuchi,Consolato Carlo Versace,Giuseppe Strangi,Roberto Bartolino +5 more
TL;DR: In this article, the authors used variable angle spectroscopic ellipsometry to estimate the optical band-gap energy of ITO-covered float glasses, as well as X-ray measurements to study the electric and optical properties.
Journal ArticleDOI
Delayed Ignition of Autocatalytic Combustion Precursors: Low-Temperature Nanomaterial Binder Approach to Electronically Functional Oxide Films
Myung-Gil Kim,Jonathan W. Hennek,Hyun Sung Kim,Hyun Sung Kim,Mercouri G. Kanatzidis,Antonio Facchetti,Tobin J. Marks +6 more
TL;DR: It is shown that the low processing temperatures of sufficiently thick combustion precursor films can be applied to the synthesis of metal oxide nanocomposite films from nanomaterials overcoated/impregnated with the appropriate combustion precursor to exhibit significant enhancements in charge-transport properties vs conventionally processed oxide films while maintaining desirable intrinsic electronic properties.
Journal ArticleDOI
Complementary inverter circuits based on p-SnO2 and n-In2O3 thin film transistors
Dhananjay,Chih-Wei Chu,Chih-Wei Chu,Chun-Wei Ou,Meng-Chyi Wu,Zhong-Yo Ho,Kuo-Chuan Ho,Shih-Wei Lee +7 more
TL;DR: In this paper, thin film transistors (TFTs) of indium oxide (In2O3) and tin oxide (SnO2) were fabricated on SiO2 gate dielectric using reactive evaporation process.
References
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International tables for X-ray crystallography
Norman Fordyce McKerron Henry,Lonsdale, Kathleen, Dame,John S. Kasper,Caroline H. MacGillavry,Gerard D. Rieck,James A. Ibers,Walter C. Hamilton +6 more
Journal ArticleDOI
Electrochromic tungsten oxide films: Review of progress 1993–1998
TL;DR: In this article, the progress that has taken place since 1993 with regard to film deposition, characterization by physical and chemical techniques, optical properties, as well as electrochromic device assembly and performance is reviewed.
Journal ArticleDOI
Electrical, optical, and structural properties of indium–tin–oxide thin films for organic light-emitting devices
Heung Soo Kim,Charles M. Gilmore,Alberto Piqué,James S. Horwitz,Hedi Mattoussi,Hideyuki Murata,Zakya H. Kafafi,Douglas B. Chrisey +7 more
TL;DR: In this paper, high-quality indium-tin-oxide (ITO) thin films were grown by pulsed laser deposition (PLD) on glass substrates without a postdeposition annealing treatment.
Journal ArticleDOI
Stress-related effects in thin films
John A. Thornton,D.W. Hoffman +1 more
TL;DR: In this paper, the fundamental nature of the internal stresses that are found in both evaporated and sputtered coatings is reviewed from the point of view of decorative coating applications, which indicate that apparatus geometry is particularly important in determining the state of stress that forms in deposits.
Journal ArticleDOI
Tin doped indium oxide thin films: Electrical properties
TL;DR: In this article, a detailed description of the conduction mechanism and the main parameters that control the conductivity of ITO films are presented, on account of the large varieties and differences in the fabrication techniques.
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