Journal ArticleDOI
EBES: A practical electron lithographic system
TLDR
The electron beam exposure system (EBES) as discussed by the authors combines continuous translation of the mask or wafer substrate with periodic deflection of the electron beam in a raster-scan mode of exposure.Abstract:
An electron beam exposure system (EBES) has proven to be practical and economic for generating high-quality fine-featured integrated circuit masks. It is also capable of exposing patterns directly on resist-coated silicon wafers and, when so used, is an effective tool with which to develop new semiconductor devices. EBES combines continuous translation of the mask or wafer substrate with periodic deflection of the electron beam in a raster-scan mode of exposure. Substrate position is monitored by means of laser interferometers. The strategy permits both the electronic and mechanical subsystems to work well within their limits of capability and contributes to system reliability. It also permits the system to be stepped up to higher resolution and faster exposure as brighter electron sources, more sensitive resist, and faster data processing techniques are developed.read more
Citations
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Book
Principles of Lithography
TL;DR: The second edition of this book as discussed by the authors was written to address several needs, and the revisions for the second edition were made with those original objectives in mind, and many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail.
Journal ArticleDOI
Lithography and Other Patterning Techniques for Future Electronics
TL;DR: In this paper, the authors focus on the benefits of using ICs at the 22-nm node and beyond, and no shortage of ideas on how to accomplish this, although it is not clear that optics will be the most economical in this range; extreme ultraviolet is still the official front runner, and electron beam lithography, which has demonstrated minimum features less than 10 nm wide, continues to be developed both for mask making and for directly writing on the wafer (also known as ldquomaskless lithographyrdquo).
Lithography and Other Patterning Techniques for Future Electronics As integrated circuits continue to go smaller, laying down circuit patterns on semiconductor material becomes more expensive and new techniques are needed.
R. Fabian Pease,Stephen Y. Chou +1 more
TL;DR: The benefits of continuing to be able to manufacture electronics at the 22-nm node and beyond appear to justify the investment, and there is no shortage of ideas on how to accomplish this.
Journal ArticleDOI
Nanostructure-based electrical biosensors
Somenath Roy,Zhiqiang Gao +1 more
TL;DR: In this article, the authors summarize the latest developments in the application of nanostructure-based biosensors with an electrical transduction mechanism, in ultrasensitive detection of biological entities, especially nucleic acids and proteins.
Journal ArticleDOI
Critical currents associated with the interaction of commensurate flux-line sublattices in a perforated Al film
TL;DR: In this paper, the flux flow critical current as a function of transverse magnetic field for an oxygen-doped Al film perforated with a two-dimensional triangular lattice pattern of holes shows pronounced structure at harmonically related values of applied magnetic field.
References
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Journal ArticleDOI
Electron irradiation of poly(olefin sulfones). Application to electron beam resists
M. J. Bowden,L. F. Thompson +1 more
TL;DR: In this article, the authors examined all the poly(olefin sulfones) examined degraded rapidly under electron irradiation and found that the dose required to effect a molecular weight distribution completely separated from the original distribution as required for fractional solution development was similar for all polymers, viz., 1--2 x 10/sup -6/ coulomb/cm/sup 2.
Journal ArticleDOI
Lithography and radiation chemistry of epoxy containing negative electron resists
TL;DR: A class of negative electron-beam resist copolymers of glycidyl methacrylate and ethyl acrylate is described in this paper, which have excellent lithographic characteristics.
Journal ArticleDOI
Computer-controlled resist exposure in the scanning electron microscope
TL;DR: In this article, a computer-controlled scanning electron microscope (CCSEM) was used to expose polymethyl methacrylate (PMM) in a resist form for microelectronic device fabrication and in bulk form to determine energy dissipation profiles.
Journal ArticleDOI
E-Beam Writing Techniques for Semiconductor Device Fabrication
TL;DR: A fully computer-controlled electron-beam pattern generator will be described which has been developed to advance the economic feasibility of electron beam writing.
Journal ArticleDOI
Computer-controlled scanning electron microscope system for high-resolution microelectronic pattern fabrication
TL;DR: A small, dedicated computer has been interfaced to a scanning electron microscope (SEM) for the purpose of generating, registering, and fabricating microelectronic device and circuit patterns with submicron dimensions.