Journal ArticleDOI
Electropolishing Silicon in Hydrofluoric Acid Solutions
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This article is published in Journal of The Electrochemical Society.The article was published on 1958-07-01. It has received 597 citations till now. The article focuses on the topics: Electropolishing & Hydrofluoric acid.read more
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Book ChapterDOI
Details of Fabrication Techniques of Various Lotus Metals and Alloys, Lotus Intermetallic Compounds, Lotus Semiconductors, and Lotus Ceramics
TL;DR: In this paper, case studies are shown by different atmospheric gases and by different materials such as intermetallic compounds, semiconductors, ceramics, and magnesium and iron alloys.
Journal ArticleDOI
Non-Monotonous Relaxation of the Luminescence Intensity of Porous Silicon
TL;DR: In this paper, the authors investigated the relaxation of the luminescence intensity for porous silicon with red light excitation and proposed a model to explain the observed effects as manifestations of a general carrier relaxation process.
Proceedings ArticleDOI
Fabrication and Characterization of Gated Porous Silicon Cathode Field Emission Arrays
TL;DR: Gated porous silicon cathode field emission arrays have been fabricated by using a simple self-aligning gate process which results in reproducible physical characteristics across the entire array as discussed by the authors.
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Effect of Laser Illumination on Oxidization of Porous Silicon
TL;DR: In this article, the effect of laser illumination (argon laser line of 488 nm) on the oxidization process of the inner surfaces of porous silicon (PS) by measuring the photoluminescence (PL), Fourier transform infrared (FTIR) absorption and x-ray photoelectron spectroscope was compared.
Book ChapterDOI
Nano-porous polysilicon fabrication for micro electro mechanical system (MEMS) drug delivery device
TL;DR: In this paper, the authors used stain etching in solution consisting of HF, HNO3 and H2O in a ratio of 1:3:5 by volume to create the nano-porous structures.