Journal ArticleDOI
Enhanced Response of Co-Planar MEMS Microheater-Based Methane Gas Sensor
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TLDR
In this paper, a high performance coplanar MEMS microheater based gas sensor, in respect of its portability and power consumption, with enhanced response, has been designed, fabricated and characterized.Abstract:
A high performance coplanar MEMS microheater based gas sensor, in respect of its portability and power consumption, with enhanced response, has been designed, fabricated and characterized. Pt microheater, along with interdigitated electrodes (IDE) and Methane sensing layer were deposited on micro machined silicon substrates. Performance of the microheater was analyzed in terms of power consumption and heat distribution uniformity. Existence of a leakage voltage was detected which was found to reduce the overall sensor performance. Source of this leakage voltage was theoretically and experimentally investigated. To reduce the effect of such leakage voltage on sensor performance, a low drift OPAmp based high gain cancellation circuit was subsequently designed, implemented and an enhanced response of about 70% was observed as against 40% for uncompensated coplanar sensors. An exhaustive sensor characterization study was carried out for different concentrations of methane and performance was analyzed in terms of sensitivity, response, recovery time etc. A sensitivity of about 73% was observed for 5000ppm methane concentration with a moderate response (110 sec) and good recovery (30 sec) time.read more
Citations
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Micromachining a miniaturized capillary electrophoresis-based chemical analysis system on a chip
TL;DR: Micromachining technology was used to prepare chemical analysis systems on glass chips that utilize electroosmotic pumping to drive fluid flow and electrophoretic separation to distinguish sample components with no moving parts.
Journal ArticleDOI
Free-standing, thin-film sensors for the trace detection of explosives.
Peter P. Ricci,Otto J. Gregory +1 more
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Journal ArticleDOI
A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure
Feng Xue,G. Adedokun,Dongcheng Xie,Ruicheng Liu,Yan Feng Zhang,Mustafa Muhammad,Lei Xu,Feng Wu +7 more
TL;DR: In this article , a low-power multichannel metal oxide semiconductor (MOS) gas sensor device was presented, including a gas sensor with four gas detecting channels, which adopts a T-shaped structure having a bridge-type single strip microheater along its horizontal axis.
Journal ArticleDOI
An electrochemical biosensor with integrated microheater to improve the sensitivity of electrochemical nucleic acid biosensors
Iremnur Akcakoca,Hamed Ghorbanpoor,Ewen O. Blair,Yasin Ozturk,Araz Norouz Dizaji,Tanıl Kocagoz,Huseyin Avci,Damion K. Corrigan,Fatma Dogan Guzel +8 more
TL;DR: It is concluded that the microheater indeed can significantly improve the performance of the nucleic acid hybridisation assay and paves the way for the development of highly sensitive and specific integrated label-free biosensors.
Proceedings ArticleDOI
A Low Power 4-Channel Single-Cantilever Metal-Oxide Gas Sensor Cell with Gas Identification Capability
TL;DR: A low power 4-channel metaloxide (MOx) gas sensor cell based on a single cantilever, which shows gas identification capability, is presented in this article, where the response characteristics of the four channels are different under the same input heating voltage, and the response change trend of each channel is also different with different target gas as the input heating volt changes.
References
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Journal ArticleDOI
Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip
TL;DR: In this article, the authors demonstrated a miniaturized system for sample handling and separation using electrophoresis-based separations of amino acids with up to 75,000 theoretical plates in about 15 seconds.
Micromachining a miniaturized capillary electrophoresis-based chemical analysis system on a chip
TL;DR: Micromachining technology was used to prepare chemical analysis systems on glass chips that utilize electroosmotic pumping to drive fluid flow and electrophoretic separation to distinguish sample components with no moving parts.
Journal ArticleDOI
Planar chips technology for miniaturization and integration of separation techniques into monitoring systems. Capillary electrophoresis on a chip
Andreas Manz,D.J. Harrison,Elisabeth Verpoorte,James C. Fettinger,Aran Paulus,H. Lüdi,H.M. Widmer +6 more
TL;DR: In this paper, a chip-like structure for capillary electrophoresis is presented, which is based on the photolithographic technique for structures in the micrometer range.
Journal ArticleDOI
Nanostructured Materials for Room-Temperature Gas Sensors
TL;DR: The most important advances with regard to fundamental research, sensing mechanisms, and application of nanostructured materials for room-temperature conductometric sensor devices are reviewed here and particular emphasis is given to the relation between the nanostructure and sensor properties in an attempt to address structure-property correlations.
Journal ArticleDOI
Zinc Oxide Nanostructures for NO2 Gas–Sensor Applications: A Review
TL;DR: Various factors such as NO2 concentrations, annealing temperature, ZnO morphologies and particle sizes, relative humidity, operating temperatures which are affecting the NO2 gas sensing properties are discussed in this review.