Journal ArticleDOI
Fabrication and characterization of folded SU-8 suspensions for MEMS applications
Daniel Bachmann,Bernd Schoberle,S Kühne,Yves Leiner,Christofer Hierold +4 more
- Vol. 130, pp 379-386
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TLDR
In this article, a wafer-level fabrication technique for polymeric springs combined with a silicon proof mass is presented for applications in MEMS force sensors or scanning micromirrors, where passive test structures for the determination of mechanical parameters of the polymer are integrated on the wafer during device fabrication.Abstract:
A novel wafer-level fabrication technique for polymeric springs combined with a silicon proof mass is presented for applications in MEMS force sensors or scanning micromirrors. Furthermore, passive test structures for the determination of mechanical parameters of the polymer are integrated on the wafer during device fabrication. The test structures allow for chip scale process monitoring in respect to the material parameters. The large difference of material stiffness and thickness between the springs and the proof mass concentrates the entire mechanical deformation into the springs. Furthermore, the polymeric springs can be used as electrically isolated suspension for electrostatically levitated devices. Devices have been fabricated and characterized by means of frequency response analysis. Thereby, a polymeric suspension with a spring constant of 8.7 N/m is presented, while the suspended structure itself features a spring constant of 140 kN/m. Material properties of the spring material (SU-8 2025) were measured to be 2.45 ± 0.6 GPa, 27.2 ± 2.2 MPa and 13.8 ± 3.2 MPa/m, for Young's modulus, the residual stress and the residual stress gradient, respectively.read more
Citations
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Journal ArticleDOI
SU-8 as a structural material for labs-on-chips and microelectromechanical systems.
TL;DR: Different SU‐8‐based techniques have led to new low‐temperature processes suitable for the fabrication of a wide range of objects, from the single component to the complete lab‐on‐chip.
Journal ArticleDOI
On the design and fabrication by two-photon polymerization of a readily assembled micro-valve
Charalampos Schizas,Vasileia Melissinaki,Vasileia Melissinaki,Arune Gaidukeviciute,Carsten Reinhardt,Christoph Ohrt,V. Dedoussis,Boris N. Chichkov,Costas Fotakis,Costas Fotakis,Maria Farsari,D. Karalekas +11 more
TL;DR: In this article, the conceptual design and fabrication of a complex shape, readily assembled micro check valve using the two-photon polymerization technique was reported, which exhibited good dimensional accuracy when compared to the CAD-created valve design and the capability of an internal moving component to perform its intended function.
Journal ArticleDOI
Diffusing and swelling in SU-8: insight in material properties and processing
Kristof Wouters,Robert Puers +1 more
TL;DR: In this article, the volume change is measured when the SU-8 epoxy is submersed in common processing liquids such as propylene glycol methyl ether acetate and isopropyl alcohol, both liquids used during the development, and found to be very low in water.
Journal ArticleDOI
Measuring the mechanical behaviour of human oocytes with a very simple SU-8 micro-tool
TL;DR: The elasticity of human oocytes has been estimated by means of a very simple SU-8 microsystem and a “flattening parameter” of the oocytes is proposed as a function of the applied load.
Journal ArticleDOI
Influence of air humidity on polymeric microresonators
TL;DR: In this article, the influence of air humidity on polymeric microresonators is investigated by means of three different resonator types, i.e., SU-8 microbeams, microstrings and a silicon micromirror.
References
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Journal ArticleDOI
The Tension of Metallic Films Deposited by Electrolysis
TL;DR: It is well known that metallic films deposited electrolytically are in many cases liable to peel off if deposited to any considerable thickness as discussed by the authors, especially if it does not adhere very tightly to the body on which it is deposited.
Journal ArticleDOI
SU-8: a low-cost negative resist for MEMS
TL;DR: In this paper, the characterization of a home-made negative photoresist developed by IBM is described, called SU-8, which can be produced with commercially available materials and has an outstanding aspect ratio near 15 for lines and 10 for trenches, combined with the electroplating of copper allow the fabrication of highly integrated electromagnetic coils.
Book
Energy principles and variational methods in applied mechanics
TL;DR: In this paper, the authors present a review of the work, energy, and variational calculus of solid mechanics and their application in the analysis of plate models. But their focus is on the theory and analysis of plates.
Journal ArticleDOI
M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
P.M. Osterberg,S.D. Senturia +1 more
TL;DR: In this article, a set of electrostatically actuated microelectromechanical test structures (M-Test) is proposed for measuring material properties at the wafer level during both process development and manufacturing.
Journal ArticleDOI
Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction
TL;DR: A review of mechanisms of adhesion and stiction, various measurement techniques, and methods used to reduce stiction in magnetic storage devices and micro/nanoelectromechanical systems can be found in this paper.
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