Journal ArticleDOI
Microfabrication: LIGA-X and applications
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TLDR
X-ray LIGA (Lithography, Electrogrowth, Moulding) is one of today's key technologies in microfabrication and upcoming modern (meso)-nano fabrication, already used and anticipated for micromechanics (micromotors, microsensors, spinnerets, etc.), micro-optics, micro-hydrodynamics (fluidic devices), microbiology, in medicine, in biology, and in chemistry for microchemical reactors.About:
This article is published in Applied Surface Science.The article was published on 2000-09-01. It has received 96 citations till now. The article focuses on the topics: LIGA & X-ray lithography.read more
Citations
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SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography
A. del Campo,Christian Greiner +1 more
TL;DR: The SU-8 photoresist has become the favourite photoreist for high-aspect-ratio (HAR) and three-dimensional (3D) lithographic patterning due to its excellent coating, planarization and processing properties as well as its mechanical and chemical stability as mentioned in this paper.
Journal ArticleDOI
Thermoelectric microdevice fabricated by a MEMS-like electrochemical process.
TL;DR: This work shows an inexpensive, electrochemical technique to build MEMS-like structures that contain several different metals and semiconductors with three-dimensional bridging structures, and demonstrates this technique by building a working microthermoelectric device.
Journal ArticleDOI
Fabrication approaches for generating complex micro- and nanopatterns on polymeric surfaces.
TL;DR: This research presents a meta-lithography program that automates and automates the very labor-intensive and therefore time-heavy and expensive and expensive process of writing and material deposition for two-Photon Lithography.
Journal ArticleDOI
Study of precision micro-holes in borosilicate glass using micro EDM combined with micro ultrasonic vibration machining
TL;DR: In this paper, a machining method that combines micro electrical discharge machining and micro ultrasonic vibration machining was proposed for producing precise micro-holes with high aspect ratios in borosilicate glass.
Journal ArticleDOI
A review of geometrical and microstructural size effects in micro-scale deformation processing of metallic alloy components
TL;DR: In this article, the authors summarized the current state-of-the-art in understanding the geometrical and microstructural SEs and their interaction in deformation processing of µ-scale components.
References
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Journal ArticleDOI
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
TL;DR: In this article, the atomic scattering factors for all angles of coherent scattering and at the higher photon energies are obtained from these tabulated forward-scattering values by adding a simple angle-dependent form-factor correction.
Journal ArticleDOI
X-ray and neutron scattering from rough surfaces
TL;DR: It is shown how various well-known asymptotic power laws in S(q) are obtained from the above theory, and the theory is compared with experimental results on x-ray scattering from a polished Pyrex glass surface.
Journal ArticleDOI
An integrated nanoliter DNA analysis device
Mark A. Burns,Brian N. Johnson,Sundaresh N. Brahmasandra,Kalyan Handique,James R. Webster,Madhavi Krishnan,Timothy S. Sammarco,Piu M. Man,Darren Jones,Dylan Heldsinger,Carlos H. Mastrangelo,David T. Burke +11 more
TL;DR: A device was developed that uses microfabricated fluidic channels, heaters, temperature sensors, and fluorescence detectors to analyze nanoliter-size DNA samples to facilitate the use of DNA analysis in applications such as rapid medical diagnostics and point-of-use agricultural testing.
Book
Micromachined Transducers Sourcebook
TL;DR: In this paper, the authors present an overview of Micromachining Techniques, Mechanical Transducers, Optical Transducers and Ionizing Radiation Transducers for Microfluidic Devices.
Journal ArticleDOI
The Fluid Mechanics of Microdevices—The Freeman Scholar Lecture
TL;DR: In this article, the authors review the status of the understanding of fluid flow phenomena particular to microdevices and emphasize the use of MEMS as sensors and actuators for flow diagnosis and control.
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