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Journal ArticleDOI

Recent developments in interferometry for microsystems metrology

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TLDR
This poster presents a probabilistic procedure for inferring the shape of the Tv-Holography system using Holographic Microscopy and White-Light Interferometry data.
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This article is published in Optics and Lasers in Engineering.The article was published on 2009-02-01. It has received 30 citations till now. The article focuses on the topics: Electronic speckle pattern interferometry & Digital holographic microscopy.

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Citations
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Review of single-shot 3D shape measurement by phase calculation-based fringe projection techniques

TL;DR: The single-shot 3D shape measurement techniques by projecting and capturing one fringe pattern image on the object surface, the wrapped phase demodulation algorithms from one captured image are reviewed.
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High temperature characterization of PZT(0.52/0.48) thin-film pressure sensors

TL;DR: In this paper, a thin-film Pb(Zr0.52Ti0.48) micro diaphragm pressure sensor for high temperature and high pressure conditions is presented.
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Measurement of discontinuous surfaces using multiple-wavelength interferometry

TL;DR: In this paper, a three-wavelength interferometric technique is used with a phase-shifting phase evaluation procedure, which gives wrapped phase at any pixel corresponding to these wavelengths.
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A novel phase-shifting method based on strip marker

TL;DR: In this paper, a strip marker is added in the projected fringe, which gives the indication for strip order, and no additional fringe pattern is required, that makes the time cost on fringe projection highly reduced.
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Measurement of large discontinuities using single white light interferogram.

TL;DR: Hilbert transformation analysis of a single white light interferogram acquired with a single-chip color CCD camera for step height measurement which lies beyond the unambiguous range of the monochromatic interferometry is discussed.
References
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Journal ArticleDOI

Mirau correlation microscope.

TL;DR: A correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter is constructed, which predicts accurately both the transverse resolution at a sharp edge and the range resolution for a perfect plane reflector.
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Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition

TL;DR: In this paper, a technique to perform two-wavelengths digital holographic microscopy (DHM) measurements with a single hologram acquisition is presented, where the vertical measurement range without phase ambiguity is extended to the micron range, thanks to the resulting synthetic wavelength defined by the beating of two wavelengths with a separation of about 80nm.
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Image formation in phase-shifting digital holography and applications to microscopy

TL;DR: This work discusses image formation in phase-shifting digital holography by developing an analytical formulation based on the Fresnel-Kirchhoff diffraction theory that is derived for general configurations in which a spherical reference is employed.
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Parameter-optimized digital holographic microscope for high-resolution living-cell analysis

TL;DR: In this paper, a parameter-optimized off-axis setup for digital holographic microscopy is presented for simultaneous, high-resolution, full-field quantitative amplitude and quantitative phase contrast microscopy and the detection of changes in optical path length in transparent objects, such as undyed living cells.
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Determination of fringe order in white-light interference microscopy

TL;DR: The algorithm adapts to surface texture and noise level and dynamically compensates for optical aberrations, distortions, diffraction, and dispersion that would otherwise lead to incorrect fringe order.
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