Journal ArticleDOI
Nano-opto-mechanical actuator driven by gradient optical force
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In this paper, a nanoscale opto-mechanical actuator driven by gradient optical force is designed and demonstrated, which can achieve a maximum displacement of 67 nm with a response time of 94.5 nm.Abstract:
In this letter, a nanoscale opto-mechanical actuator driven by gradient optical force is designed and demonstrated. The nanoscale actuator can achieve a maximum displacement of 67 nm with a response time of 94.5 ns. The optical force is estimated as 1.01 pN/μm/mW in C-band operating wavelengths. The device is fabricated on silicon-on-insulator wafer using standard dry etching processes. Compared with traditional microelectromechanical systems actuators driven by electrostatic force, the nanoscale opto-mechanical actuator has the advantages of high resolution of actuation, nanoscale displacement, and fast operating speed. It has potential applications in optical signal processing, chemical, and biological sensing.read more
Citations
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NEMS actuator driven by electrostatic and optical force with nano-scale resolution
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Proceedings ArticleDOI
Nano-scale optical actuation based on coupled one-dimensional photonic crystal cavities
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References
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