Journal ArticleDOI
Nano-opto-mechanical actuator driven by gradient optical force
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TLDR
In this paper, a nanoscale opto-mechanical actuator driven by gradient optical force is designed and demonstrated, which can achieve a maximum displacement of 67 nm with a response time of 94.5 nm.Abstract:
In this letter, a nanoscale opto-mechanical actuator driven by gradient optical force is designed and demonstrated. The nanoscale actuator can achieve a maximum displacement of 67 nm with a response time of 94.5 ns. The optical force is estimated as 1.01 pN/μm/mW in C-band operating wavelengths. The device is fabricated on silicon-on-insulator wafer using standard dry etching processes. Compared with traditional microelectromechanical systems actuators driven by electrostatic force, the nanoscale opto-mechanical actuator has the advantages of high resolution of actuation, nanoscale displacement, and fast operating speed. It has potential applications in optical signal processing, chemical, and biological sensing.read more
Citations
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Micromachined tunable metamaterials: a review
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Optomechanical sensing with on-chip microcavities
TL;DR: In this article, the authors introduce the basic physical concepts of cavity optomechanics, and describe some of the most typical experimental cavity optOMEchanical systems for sensing applications, and discuss the noise arising from various sources.
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Nano-optomechanical Actuator and Pull-Back Instability
M. Ren,M. Ren,J. G. Huang,Hong Cai,Julius Ming-Lin Tsai,Jinxiong Zhou,Zishun Liu,Zhigang Suo,Ai Qun Liu,Ai Qun Liu +9 more
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Giant transverse optical forces in nanoscale slot waveguides of hyperbolic metamaterials.
TL;DR: The calculation on realistic metal-dielectric multilayer structures indicates that the predicted giant optical forces are achievable in experiments, which will open the door for various optomechanical applications in nanoscale, such as optical nanoelectromechanical systems, optical sensors and actuators.
Journal ArticleDOI
Classical and fluctuation‐induced electromagnetic interactions in micron‐scale systems: designer bonding, antibonding, and Casimir forces
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References
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Optical MEMS for Lightwave Communication
TL;DR: In this article, the authors review the current state of the art of MEMS devices and subsystems for lightwave communication applications, which can either be broadband (wavelength independent) or wavelength selective.
Journal ArticleDOI
Optomechanical device actuation through the optical gradient force
Dries Van Thourhout,Joris Roels +1 more
TL;DR: In this article, the authors summarized the rapid development in this field and discussed several experimental demonstrations and approaches for enhancing the strength of the optical gradient force, and some of the possible applications of the effect are reviewed.
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Design of large deflection electrostatic actuators
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A review of MEMS external-cavity tunable lasers
Ai Qun Liu,Xuming Zhang +1 more
TL;DR: In this paper, the state-of-the-art of miniaturized tunable lasers constructed by microelectromechanical systems (MEMS) technology, covering various topics of laser configurations, theoretical studies and some design issues, with primary focus on the uniqueness of MEMS tunable laser in comparison to conventional opto-mechanical counterparts.
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Advanced fiber optical switches using deep RIE (DRIE) fabrication
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