Journal ArticleDOI
Stress relaxation and thermal evolution of film properties in amorphous carbon
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TLDR
In this article, a model for the stress relaxation of amorphous carbon films containing high concentrations of fourfold coordinated carbon is presented, and the distribution of activation energies for this process is derived from the experimental measurements of stress relaxation and is found to range from 1 eV to over 3 eV.Abstract:
A model for the stress relaxation of amorphous carbon films containing high concentrations of fourfold coordinated carbon is presented. The onset of stress relaxation in these materials occurs following thermal annealing at temperatures as low as 100°C, and near full stress relaxation occurs after annealing at 600°C. The stress relaxation is modeled by a series of first order chemical reactions which lead to a conversion of some fourfold coordinated carbon atoms into threefold coordinated carbon atoms. The distribution of activation energies for this process is derived from the experimental measurements of stress relaxation and is found to range from 1 eV to over 3 eV. Permanent increases in the electrical conductivity of the carbon films are also found following thermal annealing. The electrical conductivity is found to be exponentially proportional to the number of additional threefold atoms which are created upon annealing, with the increase in threefold atom concentration being deduced from the stress relaxation model. This indicates that the increase in electrical conductivity and the stress relaxation originate from the same fourfold to threefold conversion process and that electrical transport through these films is dominated by a hopping conduction process.read more
Citations
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Journal ArticleDOI
Diamond-like amorphous carbon
TL;DR: In this paper, the authors describe the deposition methods, deposition mechanisms, characterisation methods, electronic structure, gap states, defects, doping, luminescence, field emission, mechanical properties and some applications of diamond-like carbon.
Journal ArticleDOI
Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon
Andrea C. Ferrari,B. Kleinsorge,N. A. Morrison,Anastasios John Hart,Vlad Stolojan,John Robertson +5 more
TL;DR: In this paper, a comprehensive study of the stress release and structural changes caused by postdeposition thermal annealing of tetrahedral amorphous carbon (ta-C) on Si has been carried out.
Journal ArticleDOI
Low-temperature thermal conductivity and acoustic attenuation in amorphous solids
TL;DR: In this article, all measurements published on the low-temperature thermal conductivity and acoustic attenuation in amorphous solids have been reviewed, on a total of over 60 different compositions.
Journal ArticleDOI
Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond
T. A. Friedmann,John P. Sullivan,James Arthur Knapp,David R. Tallant,David M. Follstaedt,Douglas L. Medlin,P. B. Mirkarimi +6 more
TL;DR: In this article, a process for making thick, stress-free, amorphous-tetrahedrally bonded carbon (a-tC) films with hardness and stiffness near that of diamond was developed.
Journal ArticleDOI
IC-Compatible Polysilicon Surface Micromachining
TL;DR: In this article, an integrated circuit (IC) fabrication method, such as planarization by chemical mechanical polishing (CMP), has enabled extension to a five-level technology and many new applications are moving beyond the prototyping phase.
References
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CRC Handbook of Chemistry and Physics
TL;DR: CRC handbook of chemistry and physics, CRC Handbook of Chemistry and Physics, CRC handbook as discussed by the authors, CRC Handbook for Chemistry and Physiology, CRC Handbook for Physics,
Journal ArticleDOI
The Tension of Metallic Films Deposited by Electrolysis
TL;DR: It is well known that metallic films deposited electrolytically are in many cases liable to peel off if deposited to any considerable thickness as discussed by the authors, especially if it does not adhere very tightly to the body on which it is deposited.
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The physics of amorphous solids
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Physics of amorphous materials
TL;DR: In this paper, the glass transition theories for glass transition factors that determine the glass-transition temperature glass-forming systems and ease of glass formation are discussed. But they do not consider the effects of defects.
Journal ArticleDOI
Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
TL;DR: A model is proposed which accounts for the formation and structure of ta-C films on the basis of the compressive stress generated by the shallow implantation of carbon ions, and an optimal range of beam energies between 15 and 70 eV, a high film stress, and a graphitic surface are predicted and confirmed by experimental evidence.
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