Journal ArticleDOI
Transmission-Type Laser THz Emission Microscope Using a Solid Immersion Lens
TLDR
In this paper, a combination of a hemispherical solid immersion lens (SIL) and an LTEM with transmission-type detection mode was used for high-resolution imaging.Abstract:
A recently developed laser terahertz (THz) emission microscope (LTEM) is a new type of inspection tool for semiconductor integrated circuits by 2-D mapping of THz emission excited by femtosecond (fs) laser pulse. For high-resolution imaging, we demonstrate the combination of a hemispherical solid immersion lens (SIL) and an LTEM with transmission-type detection mode. Unlike reflective LTEM geometries, in which both the probing fs laser pulses and the generated THz emissions utilize the same optical components, the transmission system enables flexibility in the construction of both the fs laser and the THz detection optics: The optics on the incident side of the sample are used only to manipulate the fs pulses, while those on the transmission side are meant only for manipulating the THz emission. We could improve the spatial resolution by less than 1.5 mum by combining the objective lens with the hemispherical SIL with a refractive index n = 1.98 at 780 nm.read more
Citations
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Journal ArticleDOI
Solid immersion terahertz imaging with sub-wavelength resolution
Nikita V. Chernomyrdin,A. O. Schadko,Sergey P. Lebedev,Viktor L. Tolstoguzov,Vladimir N. Kurlov,Igor V. Reshetov,Igor E. Spektor,Maksim Skorobogatiy,Stanislav O. Yurchenko,Kirill I. Zaytsev +9 more
TL;DR: In this article, the authors developed a method of solid immersion THz imaging, a noncontact technique employing the THz beam focused into evanescent-field volume and allowing strong reduction in the dimensions of THz caustic.
Journal ArticleDOI
Scanning laser THz imaging system
Hironaru Murakami,Kazunori Serita,Yuki Maekawa,Shogo Fujiwara,Eiki Matsuda,Sunmi Kim,Iwao Kawayama,Masayoshi Tonouchi +7 more
TL;DR: In this paper, the authors developed a more highly functional laser terahertz imaging system, including a scanning laser THz imaging system having the performance of high-speed and high-resolution, a scanning probe LTEM coupled with an atomic force microscope for high resolution imaging, and a dynamic THz emission microscope to investigate the ultrafast carrier dynamics two-dimensionally in the sample.
Journal ArticleDOI
Correcting the effect of refraction and dispersion of light in FT-IR spectroscopic imaging in transmission through thick infrared windows.
TL;DR: A solution to correct the spread of focus by means of adding a lens on top of the infrared transparent window, such that a pseudo hemisphere is formed, has been investigated and improved spatial resolution is demonstrated.
Journal ArticleDOI
Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope
TL;DR: In this paper, the waveforms of the terahertz pulses, emitted by exciting p-n junctions in semiconductor circuits with focused ultrafast laser pulses, depend on the interconnection structures of the circuits.
Journal ArticleDOI
Confocal THz Laser Microscope
TL;DR: In this paper, the principle of the optical confocal microscope was transferred to a far-field THz imaging system based on an optically pumped gas laser emitting radiation at 2.52 THz.
References
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Journal ArticleDOI
Cutting-edge terahertz technology
TL;DR: An overview of the status of the terahertz technology, its uses and its future prospects are presented in this article, with a focus on the use of the waveband in a wide range of applications.
Journal ArticleDOI
Materials for terahertz science and technology
Bradley Ferguson,Xi-Cheng Zhang +1 more
TL;DR: Terahertz spectroscopy and imaging provide a powerful tool for the characterization of a broad range of materials, including semiconductors and biomolecules, as well as novel, higher-power terahertz sources.
Journal ArticleDOI
Imaging with terahertz waves
B. B. Hu,Martin C. Nuss +1 more
TL;DR: This work presents what is to their knowledge the first imaging system based on optoelectronic terahertz time-domain spectroscopy, and demonstrates applications to package inspection and chemical content mapping in biological objects.
Journal ArticleDOI
T-ray imaging
TL;DR: In this paper, the authors describe the technology necessary to perform terahertz "T-ray" imaging, novel imaging techniques, and commercial applications of T-ray imaging.
Journal ArticleDOI
Recent advances in terahertz imaging
Daniel M. Mittleman,Maya R. Gupta,Ramesh Neelamani,Richard G. Baraniuk,J.V. Rudd,Martin Koch +5 more
TL;DR: The latest results in tomographic imaging, in which waveforms reflected from an object can be used to form a three-dimensional representation, are described and substantial improvements in the spatial resolution are demonstrated.