Two-scale simulation of drop-induced failure of polysilicon MEMS sensors.
TLDR
In this article, an industrially-oriented two-scale approach is provided to model the drop-induced brittle failure of polysilicon MEMS sensors, which is validated against full three-scale Monte-Carlo simulations.Abstract:
In this paper, an industrially-oriented two-scale approach is provided to model the drop-induced brittle failure of polysilicon MEMS sensors. The two length-scales here investigated are the package (macroscopic) and the sensor (mesoscopic) ones. Issues related to the polysilicon morphology at the micro-scale are disregarded; an upscaled homogenized constitutive law, able to describe the brittle cracking of silicon, is instead adopted at the meso-scale. The two-scale approach is validated against full three-scale Monte-Carlo simulations, which allow for stochastic effects linked to the microstructural properties of polysilicon. Focusing on inertial MEMS sensors exposed to drops, it is shown that the offered approach matches well the experimentally observed failure mechanisms.read more
Citations
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Signal Processing of MEMS Gyroscope Arrays to Improve Accuracy Using a 1st Order Markov for Rate Signal Modeling
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Three‐dimensional modelling of intergranular fatigue failure of fine grain polycrystalline metallic MEMS devices
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Analysis of Dynamic Performance of a Kalman Filter for Combining Multiple MEMS Gyroscopes
TL;DR: The dynamic performance of a Kalman filter was analyzed and it showed that the estimated angular rate signal could well reflect the dynamic characteristic of the input signal in dynamic conditions.
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MEMS-based surface mounted health monitoring system for composite laminates
Stefano Mariani,Alberto Corigliano,Francesco Caimmi,Matteo Bruggi,Paolo Bendiscioli,Marco De Fazio +5 more
TL;DR: This work discusses a methodology to monitor the state of crack-containing composite laminates through low-cost, commercial off-the-shelf MEMS accelerometers, and adopts cyclic loading conditions, which highlights the sensitivity of the monitoring scheme to the crack length.
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Overall elastic domain of thin polysilicon films
TL;DR: In this article, a numerical study aimed to define the overall elastic domain of thin polysilicon films subjected to in-plane loadings is presented, where homogenized properties are obtained for digital polycrystalline microstructures generated in a representative volume element (RVE) through Voronoi tessellations.
References
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Inelastic Analysis of Structures
Milan Jirásek,Z. P. Bazant +1 more
TL;DR: Reference EPFL-BOOK-102881 URL: http://www.wiley.co.uk/inelastic/ Record created on 2007-04-23, modified on 2016-08-08.
Journal ArticleDOI
Dynamic pull-in phenomenon in MEMS resonators
TL;DR: In this paper, the pull-in instability in microelectromechanical (MEMS) resonators was studied and the authors proposed a low-voltage MEMS RF switch actuated with a combined DC and AC loading, which uses a voltage much lower than the traditionally used DC voltage.
Journal ArticleDOI
Mechanics of adhesion in MEMS - a review
Ya-Pu Zhao,Lisen Wang,Tongxi Yu +2 more
TL;DR: A review of the mechanics of microscale adhesion in microelectromechanical systems (MEMS) is presented in this article, where dimensionless numbers such as Tabor number, adhesion parameter and peel number for microscale elastic adhesion contact are discussed in detail.
Journal ArticleDOI
Localization limiters in transient problems
David Lasry,Ted Belytschko +1 more
TL;DR: In this paper, a simple remedy based on introducing additional higher order terms in the governing equations in the strain-softening portions of the domain is proposed, and the resulting formulation provides solutions which are independent of element size with a finite energy dissipation.
Journal ArticleDOI
Discrete vs smeared crack models for concrete fracture: bridging the gap
TL;DR: In this article, discrete and smeared crack models for concrete fracture are discussed in a historical perspective, and it is argued that these two computational approaches, originally conceived as very different, can be brought together by exploiting the partition-of-unity property of finite element shape functions.