Journal ArticleDOI
Monte carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks
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TLDR
In this article, the authors exploit a multi-scale framework to model the shock-induced failure of polysilicon micro electro-mechanical systems (MEMS), and study the impact of uncertainties at polycrystal length-scale on the results.Abstract:
In this work we exploit a multi-scale framework to model the shock-induced failure of polysilicon micro electro-mechanical systems (MEMS), and study the impact of uncertainties at polycrystal length-scale on the results. Because of polysilicon brittleness, MEMS sensors almost instantaneously fail by micro-cracking when subjected to shocks. Since the length of the zone where such micro-cracking is spreading can amount to 5–10% of the characteristic grain size, the morphology of polysilicon films constituting the movable parts of the MEMS is explicitly modeled at the micro-scale within a cohesive approach. Focusing on shocks induced by accidental drops, forecasts of MEMS failure are obtained through a Monte Carlo methodology, wherein statistics of the polycrystalline morphology are accounted for. Outcomes, in terms of failure mode and drop height leading to failure, are shown to correctly represent available experimental evidences relevant to a commercial micro-device.read more
Citations
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Journal ArticleDOI
Fracture of solar-grade anisotropic polycrystalline Silicon: A combined phase field–cohesive zone model approach
TL;DR: Paggi et al. as discussed by the authors presented a novel computational framework to simulate fracture events in brittle anisotropic polycrystalline materials at the microscopical level, with application to solar-grade poly crystalstalline Silicon.
Journal ArticleDOI
Overall elastic properties of polysilicon films: a statistical investigation of the effects of polycrystal morphology
TL;DR: In this paper, the effects of polycrystal morphology on the overall properties of polysilicon were investigated, focusing on two-dimensional representative volume elements (RVEs) of textured films, numerically generated through Voronoi tessellations and assuming the inplane orientation of the crystal lattice of silicon grains to be randomly distributed.
Journal ArticleDOI
Two-scale simulation of drop-induced failure of polysilicon MEMS sensors.
TL;DR: In this article, an industrially-oriented two-scale approach is provided to model the drop-induced brittle failure of polysilicon MEMS sensors, which is validated against full three-scale Monte-Carlo simulations.
Journal ArticleDOI
Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach.
TL;DR: Microscale uncertainties related to the geometry and morphology of polycrystalline silicon films, constituting the movable structures of micro electro-mechanical systems (MEMS), were investigated through a joint numerical/experimental approach.
Journal ArticleDOI
MEMS-based surface mounted health monitoring system for composite laminates
Stefano Mariani,Alberto Corigliano,Francesco Caimmi,Matteo Bruggi,Paolo Bendiscioli,Marco De Fazio +5 more
TL;DR: This work discusses a methodology to monitor the state of crack-containing composite laminates through low-cost, commercial off-the-shelf MEMS accelerometers, and adopts cyclic loading conditions, which highlights the sensitivity of the monitoring scheme to the crack length.
References
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Book
The finite element method
TL;DR: In this article, the methodes are numeriques and the fonction de forme reference record created on 2005-11-18, modified on 2016-08-08.
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Physical properties of crystals
TL;DR: In this paper, the physical properties of crystals systematically in tensor notation are presented, presenting tensor properties in terms of their common mathematical basis and the thermodynamic relations between them.
Journal ArticleDOI
Computational modelling of impact damage in brittle materials
G. T. Camacho,Michael Ortiz +1 more
TL;DR: In this paper, a Lagrangian finite element method of fracture and fragmentation in brittle materials is developed, where a cohesive-law fracture model is used to propagate multiple cracks along arbitrary paths.
Journal ArticleDOI
Finite-deformation irreversible cohesive elements for three-dimensional crack-propagation analysis
Michael Ortiz,Anna Pandolfi +1 more
TL;DR: In this paper, a three-dimensional finite deformation cohesive element and a class of irreversible cohesive laws are proposed to track dynamic growing cracks in a drop-weight dynamic fracture test.