Journal ArticleDOI
Ultrashort-pulse laser machining of dielectric materials
Michael D. Perry,Brent C. Stuart,P.S. Banks,Michael D. Feit,Victor Yanovsky,Alexander M. Rubenchik +5 more
TLDR
In this article, the authors show that high precision machining of all dielectrics (oxides, fluorides, explosives, teeth, glasses, ceramics, SiC, etc.) with no thermal shock or distortion of the remaining material by this mechanism is described.Abstract:
There is a strong deviation from the usual τ1/2 scaling of laser damage fluence for pulses below 10 ps in dielectric materials. This behavior is a result of the transition from a thermally dominated damage mechanism to one dominated by plasma formation on a time scale too short for significant energy transfer to the lattice. This new mechanism of damage (material removal) is accompanied by a qualitative change in the morphology of the interaction site and essentially no collateral damage. High precision machining of all dielectrics (oxides, fluorides, explosives, teeth, glasses, ceramics, SiC, etc.) with no thermal shock or distortion of the remaining material by this mechanism is described.read more
Citations
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Journal ArticleDOI
Toward Nanometer-Scale Optical Photolithography: Utilizing the Near-Field of Bowtie Optical Nanoantennas
TL;DR: Optically resonant metallic bowtie nanoantennas are utilized as fabrication tools for the first time, resulting in the production of polymer resist nanostructures <30 nm in diameter at record low incident multiphoton energy densities.
Journal ArticleDOI
Scaling laws of femtosecond laser pulse induced breakdown in oxide films
TL;DR: In this article, the scaling of the single-pulse laser threshold fluence with respect to pulse duration and material band gap energy was investigated in the sub-picosecond pulse regime using oxide films.
Patent
Architecture tool and methods of use
William L. Warren,Robert Parkhill,Robert L. Stewart,Anatoly Kachurin,Robert M. Taylor,Brian H Hargrave,Kenneth Church,Michael N. Nguyen,Mark L Kargel,Mark W. Simpkins +9 more
TL;DR: In this paper, an apparatus and methods for depositing materials on a substrate, and for performing other selected functions, such as material destruction and removal, temperature control, imaging, detection, therapy and positional and locational control, are described.
Journal ArticleDOI
Laser-induced breakdown spectroscopy for detection of explosives residues: a review of recent advances, challenges, and future prospects
TL;DR: This review discusses the application of laser-induced breakdown spectroscopy (LIBS) to the problem of explosive residue detection and demonstrates the tremendous potential of LIBS for real-time detection of explosives residues at standoff distances.
Journal ArticleDOI
Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses.
Yan Li,Kazuyoshi Itoh,Wataru Watanabe,Kazuhiro Yamada,Daisuke Kuroda,Junji Nishii,Yongyuan Jiang +6 more
TL;DR: Three-dimensional channels can be micromachined inside transparent materials by use of this method, as it is demonstrated by drilling a square-wave-shaped hole inside silica glass.
References
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Tunnel ionization of complex atoms and of atomic ions in an altemating electromagnetic field
TL;DR: In this article, an expression for the probability of tunnel ionization in an alternating field, of a complex atom and of an atomic ion that are in an arbitrary state, was derived in the quasiclassical approximation n* $1.
Journal ArticleDOI
Nanosecond-to-femtosecond laser-induced breakdown in dielectrics
Brent C. Stuart,Michael D. Feit,S. Herman,Alexander M. Rubenchik,Bruce W. Shore,Michael D. Perry +5 more
TL;DR: A decreasing threshold fluence is found associated with a gradual transition from the long-pulse, thermally dominated regime to an ablative regime dominated by collisional and multiphoton ionization, and plasma formation.
Book
Quantum Processes in Semiconductors
TL;DR: In this paper, the energy and momentum conservation of phonon-impurity coupling in the diamond lattice is discussed. But the authors do not consider the effect of photo-ionization on photo-deionization of a hydrogenic acceptor.