Proceedings ArticleDOI
Uncertainties in interferometric measurements of radius of curvature
Tony L. Schmitz,Angela Davies,Christopher J. Evans +2 more
- Vol. 4451, pp 432-447
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TLDR
In this paper, a linear slide provides motion between these positions and one or more displacement transducers is used to record the displacement between the cat's eye and confocal positions and, hence, the radius of curvature.Abstract:
The radius of curvature of spherical surfaces may be determined using the well-known radius, or optical, bench. In this method, a figure measuring interferometer is employed to identify the null positions at the center of curvature (confocal) and surface (cat's eye) of the test optic. A linear slide provides motion between these positions and one or more displacement transducers is used to record the displacement between the cat's eye and confocal positions and, hence, the radius of curvature. Measurements of a polished Zerodur sphere have been completed on the X-ray Optics Calibration Interferometer (XCALIBIR) using both Twyman-Green and Fizeau configurations. Mechanical measurements of the spherical artifact have also been completed using a coordinate measuring machine (CMM). Recorded disagreement between the individual transmission sphere measurements and CMM measurements under well-controlled environmental conditions is larger than the limits predicted from a traditional uncertainty analysis based on a geometric measurement model. Additional uncertainty sources for the geometric model, as well as a physical optics model of the propagation of light, are therefore suggested. The expanded uncertainty analysis is described.read more
Citations
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Journal ArticleDOI
Laser differential confocal radius measurement.
TL;DR: The theoretical analyses and preliminary experimental results indicate that DCRM has a relative measurement error of better than 5 ppm, and in comparison with the existing measurement methods has a high measurement precision, a strong environmental anti-interference capability and a low cost.
Journal ArticleDOI
Displacement Uncertainty in Interferometric Radius Measurements
TL;DR: In this paper, uncertainties associated with the use of multiple displacement measuring interferometers (DMIs) to record motion in a single axis by treating the specific case of displacement measurement on XCALIBIR using three DMIs equally spaced around the optical axis.
Journal ArticleDOI
Measuring Form and Radius of Spheres with Interferometry
TL;DR: In this paper, the authors describe measurements of radius and form error of a precision silicon sphere, having a nominal radius of 46.8 mm, with the extremely accurate CALIBration InterferometeR (XCALIBIR) at the National Institute of Standards and Technology (NIST).
Proceedings ArticleDOI
High-speed noninterferometric nanotopographic characterization of Si wafer surfaces
TL;DR: In this article, a high-speed silicon wafer metrology tool capable of resolving surface features in the nanometer height range is presented, which is particularly effective for resolving features near the wafer edge.
Journal ArticleDOI
Radius measurement by laser confocal technology
TL;DR: The experimental results indicate that LCRM has a relative expanded uncertainty of less than 10 ppm for both convex and concave spheres and is a feasible method for ROC measurements with high accuracy and concise structures.
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TL;DR: In this article, the state of the art in high-resolution displacement measuring interferometry is reviewed, and several approaches to improve this situation are described, including multi-wavelength inter-ferometry.