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Daniel P. Sanders
Researcher at IBM
Publications - 136
Citations - 6290
Daniel P. Sanders is an academic researcher from IBM. The author has contributed to research in topics: Photoresist & Photolithography. The author has an hindex of 36, co-authored 133 publications receiving 5922 citations. Previous affiliations of Daniel P. Sanders include Case Western Reserve University & California Institute of Technology.
Papers
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Proceedings ArticleDOI
Resist materials for 157-nm microlithography: an update
Raymond J. Hung,Hoang Vi Tran,Brian C. Trinque,Takashi Chiba,Shintaro Yamada,Daniel P. Sanders,Eric Connor,Robert H. Grubbs,John M. Klopp,Jean M. J. Fréchet,Brian Thomas,Gregory John Shafer,Darryl D. DesMarteau,Will Conley,C. Grant Willson +14 more
TL;DR: Fluorocarbon polymers and siloxane-based polymers have been identified as promising resist candidates for 157 nm material design because of their relatively high transparency at this wavelength as discussed by the authors.
Journal ArticleDOI
Synthesis of functionalized cyclic carbonate monomers using a versatile pentafluorophenyl carbonate intermediate
Daniel P. Sanders,Daniel J. Coady,Manabu Yasumoto,Masaki Fujiwara,Haritz Sardon,James L. Hedrick +5 more
TL;DR: In this article, a cyclic carbonate intermediate possessing a pendent activated pentafluorophenyl carbonate group (MTC-PFPC) was synthesized via a two-step route featuring a novel cycliccarbonate intermediate.
Proceedings ArticleDOI
Fluoro-alcohol materials with tailored interfacial properties for immersion lithography
Daniel P. Sanders,Linda K. Sundberg,Ratnam Sooriyakumaran,Phillip J. Brock,Richard Anthony DiPietro,Hoa D. Truong,Dolores C. Miller,Margaret C. Lawson,Robert D. Allen +8 more
TL;DR: In this article, the effect of structure on immersion specific properties such as water contact angle, aqueous base contact angle and dissolution rate is addressed. But, the authors focus on the relationship between structure properties and the interfacial properties of the fluorinated materials.
Patent
Impurity reduction in Olefin metathesis reactions
TL;DR: In this paper, the use of isomerization inhibitors in olefin metathesis reactions is discussed, which are low molecular weight organic acids such as formic acid, acetic acid, benzoic acid and the like.
Patent
Surface modified nanoparticles, methods of their preparation, and uses thereof for gene and drug delivery
TL;DR: In this article, a surface modified nanoparticle comprising a core comprising a material selected from the group consisting of organic materials, organometallic materials, inorganic materials, metals, metal oxides, and combinations thereof is defined.