D
Daniel P. Sanders
Researcher at IBM
Publications - 136
Citations - 6290
Daniel P. Sanders is an academic researcher from IBM. The author has contributed to research in topics: Photoresist & Photolithography. The author has an hindex of 36, co-authored 133 publications receiving 5922 citations. Previous affiliations of Daniel P. Sanders include Case Western Reserve University & California Institute of Technology.
Papers
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Journal ArticleDOI
Enabling complex nanoscale pattern customization using directed self-assembly.
Gregory S. Doerk,Joy Cheng,Gurpreet Singh,Gurpreet Singh,Charles T. Rettner,Jed W. Pitera,Srinivasan Balakrishnan,Noel Arellano,Daniel P. Sanders +8 more
TL;DR: It is shown that a hybrid organic/inorganic chemical pattern serves as a guiding pattern for self-assembly as well as a self-aligned mask for pattern customization through cotransfer of aligned block copolymer features and an inorganic prepattern.
Journal ArticleDOI
Metal-Catalyzed Addition Polymers for 157 nm Resist Applications. Synthesis and Polymerization of Partially Fluorinated, Ester-Functionalized Tricyclo[4.2.1.02,5]non-7-enes
Daniel P. Sanders,Eric Connor,Robert H. Grubbs,Raymond J. Hung,Brian Osborn,Takashi Chiba,Scott A. MacDonald,C. Grant Willson,Will Conley +8 more
TL;DR: Fluorinated tricyclonononene (TCN) structures with ester substituents exhibit up to 3 orders of magnitude more transparency at 157 nm than conventional ester-functionalized norbornene structures as determined by gas-phase vacuum-ultraviolet spectroscopy and variable angle spectroscopic ellipsometry as mentioned in this paper.
Patent
Directed self-assembly of block copolymers using segmented prepatterns
TL;DR: In this paper, a layer of polymer including a block copolymer is applied over the opening and the substrate, and allowed to self-assemble in the absence of any sidewalls.
Journal ArticleDOI
Accelerating materials discovery using artificial intelligence, high performance computing and robotics
Edward O. Pyzer-Knapp,Jed W. Pitera,Peter Staar,Seiji Takeda,Teodoro Laino,Daniel P. Sanders,J. Sexton,John R. Smith,A. Curioni +8 more
TL;DR: In materials discovery, traditional manual, serial, and human-intensive work is being augmented by automated, parallel, and iterative processes driven by Artificial Intelligence (AI), simulation and experimental automation as mentioned in this paper .
Patent
Cross-metathesis reaction of functionalized and substituted olefins using group 8 transition metal carbene complexes as metathesis catalysts
Robert H. Grubbs,Arnab K. Chatterjee,Tae-Lim Choi,Steven D. Goldberg,Jennifer A. Love,John P. Morgan,Daniel P. Sanders,Matthias Scholl,F. Dean Toste,Tina M. Trnka +9 more
TL;DR: In this article, the use of Group 8 transition metal carbene complexes as catalysts for olefin cross-metathesis reactions was proposed, in which ruthenium and osmium alkylidene complexes substituted with an N-heterocyclic carbene ligand were used to provide a variety of substituted and functionalized olefins.