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Daniel P. Sanders
Researcher at IBM
Publications - 136
Citations - 6290
Daniel P. Sanders is an academic researcher from IBM. The author has contributed to research in topics: Photoresist & Photolithography. The author has an hindex of 36, co-authored 133 publications receiving 5922 citations. Previous affiliations of Daniel P. Sanders include Case Western Reserve University & California Institute of Technology.
Papers
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Proceedings ArticleDOI
High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
Hsinyu Tsai,Hiroyuki Miyazoe,Ankit Vora,Teddie Magbitang,Noel Arellano,Chi-Chun Liu,Michael J. Maher,William J. Durand,Simon Dawes,James J. Bucchignano,Lynne Gignac,Daniel P. Sanders,Eric A. Joseph,Matthew E. Colburn,C. Grant Willson,Christopher J. Ellison,Michael A. Guillorn +16 more
TL;DR: In this article, the authors demonstrate fin-FET devices fabricated with DSA-patterned fins and compare several block-copolymers (BCP) systems for continued pitch scaling.
Journal ArticleDOI
Fluoropolymer Resist Materials for 157nm Microlithography
Hoang Vi Tran,Raymond J. Hung,Takashi Chiba,Shintaro Yamada,Thomas Mrozek,Yu-Tsai Hsieh,Charles R. Chambers,Brian Osborn,Brian C. Trinque,Matthew J. Pinnow,Daniel P. Sanders,Eric Connor,Robert H. Grubbs,Will Conley,Scott A. MacDonald,C. Grant Willson +15 more
TL;DR: Fluorocarbon polymers and siloxane-based polymers have been identified as promising resist candidates for 157nm material design because of their relatively high transparency at this wavelength as discussed by the authors.
Journal ArticleDOI
Prevention of Undesirable Isomerization During Olefin Metathesis.
TL;DR: In this article, 1,4-Benzoquinones have been used to prevent olefin isomerization of allylic ethers and long-chain aliphatic alkenes during ruthenium-catalyzed OE metathesis reactions.
Patent
Self-Segregating Multilayer Imaging Stack With Built-In Antireflective Properties
TL;DR: In this paper, a patterned material layer on a substrate using a self-segregating polymeric composition comprising a polymeric photoresistive material and an antireflective coating material is presented.
Journal ArticleDOI
Surface Assembly Configurations and Packing Preferences of Fibrinogen Mediated by the Periodicity and Alignment Control of Block Copolymer Nanodomains.
Tian Xie,Ankit Vora,Patrick J. Mulcahey,Sonia E. Nanescu,Manpreet Singh,Daniel S. Choi,Jeffrey K. Huang,Chi-Chun Liu,Daniel P. Sanders,Jong-in Hahm +9 more
TL;DR: The results demonstrate that the geometry and orientation of the protein can be effectively guided during Fg self-assembly by controlling the physical dimensions and orientations of the underlying BCP templates.