M
M. Lu
Researcher at Intel
Publications - 2
Citations - 394
M. Lu is an academic researcher from Intel. The author has contributed to research in topics: Logic gate & High-κ dielectric. The author has an hindex of 2, co-authored 2 publications receiving 352 citations.
Papers
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Proceedings ArticleDOI
45nm High-k + metal gate strain-enhanced transistors
C. Auth,Annalisa Cappellani,J.-S. Chun,A. Dalis,Alison Davis,Tahir Ghani,G. Glass,Timothy E. Glassman,Michael K. Harper,Michael L. Hattendorf,P. Hentges,S. Jaloviar,Subhash M. Joshi,Jason Klaus,K. Kuhn,D. Lavric,M. Lu,H. Mariappan,Kaizad Mistry,B. Norris,Nadia M. Rahhal-Orabi,Pushkar Ranade,J. Sandford,Lucian Shifren,V. Souw,K. Tone,F. Tambwe,A. Thompson,D. Towner,T. Troeger,P. Vandervoorn,Charles H. Wallace,J. Wiedemer,Christopher J. Wiegand +33 more
TL;DR: In this article, two key process features that are used to make 45 nm generation metal gate + high-k gate dielectric CMOS transistors are highlighted in this paper.
Proceedings ArticleDOI
MRAM as Embedded Non-Volatile Memory Solution for 22FFL FinFET Technology
Oleg Golonzka,Juan G. Alzate,Umut Arslan,M. Bohr,P. Bai,Justin S. Brockman,Buford Benjamin,Chris Connor,Nilanjan Das,Brian S. Doyle,Tahir Ghani,Fatih Hamzaoglu,Philip E. Heil,P. Hentges,Rownak Jahan,David L. Kencke,Blake C. Lin,M. Lu,M. Mainuddin,Mesut Meterelliyoz,P. Nguyen,Dmitri E. Nikonov,O'brien Kevin P,J.O Donnell,Kaan Oguz,Ouellette Daniel G,Joodong Park,Pellegren James,Conor P. Puls,Pedro A. Quintero,Tofizur Rahman,A. Romang,M. Sekhar,A. Selarka,M. Seth,Smith Andrew,Smith Angeline K,Liqiong Wei,Christopher J. Wiegand,Z. Zhang,Kevin J. Fischer +40 more
TL;DR: Embedded NVM technology presented here achieves 200°C 10-year retention capability combined with>106 cycle endurance and high die yield, and is demonstrated on 7.2Mbit arrays.