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Shom Ponoth

Researcher at IBM

Publications -  147
Citations -  2342

Shom Ponoth is an academic researcher from IBM. The author has contributed to research in topics: Layer (electronics) & Dielectric. The author has an hindex of 26, co-authored 147 publications receiving 2282 citations. Previous affiliations of Shom Ponoth include Commissariat à l'énergie atomique et aux énergies alternatives.

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Patent

Sealed air gap for semiconductor chip

TL;DR: In this paper, a semiconductor chip including a substrate, a gate within the dielectric layer, the gate including a sidewall, a contact contacting a portion of the gate, and a sealed air gap between the sidewall and the contact is described.