Journal ArticleDOI
A femtosecond laser-induced periodical surface structure on crystalline silicon
Bo Tan,Krishnan Venkatakrishnan +1 more
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TLDR
A femtosecond laser-induced periodical surface structure (LIPSS) was investigated for polished crystalline silicon as mentioned in this paper, which is similar to the classical ripples that are characterized by long, nearly parallel lines extending over the entire irradiated area on the metal and silicon surface after continuous or pulsed laser irradiation.Abstract:
A laser-induced periodic surface structure (LIPSS) has attracted research interest for its promising potential in micromachining for microelectronics and microelectromechanical systems. A femtosecond laser-induced periodical surface structure was investigated for polished crystalline silicon. The observed structure is similar to the classical ripples that are characterized by long, nearly parallel lines extending over the entire irradiated area on the metal and silicon surface after continuous or pulsed laser irradiation. The spacing of the ripples nearly equals the irradiation wavelength. The depth of these ripples increases nonlinearly with the fluence of irradiation. The orientation of these periodic structures is perpendicular to the vector of the electric field of the laser beam. It seemed that the pattern formed by a femtosecond laser complies well with conventional models. Unlike the patterns formed by a continuous or nanosecond pulsed laser, however, the spacing of the ripple formed by femtosecond pulses is not influenced by the incident angle of the laser beam. The formula used to predict the ripple spacing in the conventional model does not apply to the femtosecond laser induced ripple structure. A plausible explanation to this phenomenon is proposed. The effect of the pulse repetition rate was studied and it was found that a femtosecond laser oscillator generates the same periodic structure as the amplified laser system.read more
Citations
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Journal ArticleDOI
Dynamics of ripple formation on silicon surfaces by ultrashort laser pulses in subablation conditions
George D. Tsibidis,M. Barberoglou,Panagiotis A. Loukakos,Emmanuel Stratakis,Emmanuel Stratakis,Costas Fotakis,Costas Fotakis +6 more
TL;DR: In this article, a unified model is presented to account for crater and subwavelength ripple formation based on a synergy of electron excitation and capillary wave solidification, and details of the surface morphology attained are elaborated as a function of the imposed conditions, and results are tested against experimental data.
Journal ArticleDOI
High-harmonic generation by field enhanced femtosecond pulses in metal-sapphire nanostructure
Seunghwoi Han,Hyunwoong Kim,Yong Woo Kim,Young-Jin Kim,Seungchul Kim,In-Yong Park,Seung-Woo Kim +6 more
TL;DR: The experimental outcome confirms that the plasmonic HHG approach is a promising way to realize coherent EUV sources for nano-scale near-field applications in spectroscopy, microscopy, lithography and atto-second physics.
Journal ArticleDOI
Selective appearance of several laser-induced periodic surface structure patterns on a metal surface using structural colors produced by femtosecond laser pulses
Jian-Wu Yao,Chengyun Zhang,Hai-Ying Liu,Qiao-Feng Dai,Lijun Wu,Sheng Lan,Achanta Venu Gopal,Vyacheslav A. Trofimov,Tatiana M. Lysak +8 more
TL;DR: In this article, the authors used femtosecond laser pulses to induce ripples with a subwavelength period on the surface of a stainless steel (301 L) foil, which can be used to decorate different regions of the surface with different types of ripples.
Journal ArticleDOI
Influence of the Pulse Duration in the ps-Regime on the Ablation Efficiency of Metals
TL;DR: Ablation characteristics of copper and stainless steel with laser pulses from 10 to 100 ps at 1064 nm wavelength were studied in this article, where the influence of the pulse duration and the number of pulses on the threshold fluence and the penetration depth was investigated.
Journal ArticleDOI
Surface micro/nanostructuring of titanium under stationary and non-stationary femtosecond laser irradiation
TL;DR: In this paper, the surface topography of titanium samples irradiated by femtosecond laser pulses is described and ripples with a period of about 700nm are formed when the fluence is about 0.5 and 2.5
References
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Journal ArticleDOI
Laser-induced periodic surface structure. I. Theory
TL;DR: In this paper, a theory for laser-induced periodic surface structure was developed by associating each Fourier component of induced structure with the corresponding Fourier components of inhomogeneous energy deposition just beneath the surface.
Journal ArticleDOI
Growth of spontaneous periodic surface structures on solids during laser illumination
TL;DR: In this article, the authors developed a theory which predicts the observed spacing, polarization, and growth properties of ripple structures after illumination of metals, semiconductors, and dielectrics by intense laser pulses.
Journal ArticleDOI
Laser mirror damage in germanium at 10.6 μm
TL;DR: In this paper, the germanium output mirror of a TEA CO2 laser shows a periodicity of 10.6 μm, the laser wavelength, and an interference mechanism is proposed in which scattered and cavity radiation interfere.
Journal ArticleDOI
Laser-induced periodic surface structure. III. Fluence regimes, the role of feedback, and details of the induced topography in germanium
TL;DR: In this paper, the mechanisms responsible for the growth of periodic surface structure on Ge irradiated by 1.06-m laser pulses from a single beam are investigated using time-resolved diffraction of a weak cw probe beam from the developing structures, coupled with electron-microscope pictures of the resulting morphology.
Journal ArticleDOI
Femtosecond laser-induced periodic surface structure on diamond film
TL;DR: In this article, the laser-induced periodic surface structure (LIPSS) with periodicity about a quarter of the laser wavelength on unpolished diamond film treated by a P-polarized femtosecond laser was observed.