Journal ArticleDOI
Analysis of the Air-damping Effect on a Micromachined Beam Resonator
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An analysis of the air-damping effect on the frequency response of a micromachined beam resonator is presented in this paper, where the motion of the beam is analyzed based on the linear elastic beam theory.Abstract:
An analysis of the air-damping effect on the frequency response of a micromachined beam resonator is presented. The motion of the beam is analyzed based on the linear elastic beam theory. The air d...read more
Citations
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Journal ArticleDOI
Thermoelastic damping in micro-beam resonators
TL;DR: In this paper, the generalized thermoelastic theory with one relaxation time was used to analyze the micro-beam damping of a single-beam resonator, and the results showed that the amplitude of deflection and thermal moment are attenuated and the vibration frequency is increased with thermo-elastic coupling effect.
Journal ArticleDOI
Thermoelastic damping in micro-scale circular plate resonators
Yuxin Sun,Yuxin Sun,Masumi Saka +2 more
TL;DR: In this paper, the governing equations of coupled thermoelastic problems are established for out-of-plane vibration of a circular plate and the analytical expression for thermo-elastic damping is obtained.
Journal ArticleDOI
Vibration based electromagnetic micropower generator on silicon
TL;DR: In this paper, the theory, design and simulation of electromagnetic micropower generators with electroplated micromagnets were discussed, and the power generators were fabricated using standard microelectromechanical system processing techniques.
Journal ArticleDOI
Laser-induced vibrations of micro-beams under different boundary conditions
TL;DR: In this paper, an analytical-numerical technique based on the Laplace transform is used to calculate the vibration of the deflection and thermal moment of a micro-beam.
Journal ArticleDOI
Thermoelastic damping of the axisymmetric vibration of circular plate resonators
Yuxin Sun,Hironori Tohmyoh +1 more
TL;DR: In this article, the governing equations of coupled thermoelastic problems are established for axisymmetric out-of-plane vibration of circular plate resonators, and the analytical expression for thermo-elastic damping is obtained.
References
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Book
Viscous Fluid Flow
TL;DR: In this article, the stability of Laminar Boundary Layer Flow Appendices has been investigated in Cylindrical and Spherical Coordinates of Incompressible Newtonian Fluids.
Book
Vibration problems in engineering
TL;DR: In this article, the Probleme dynamique and Vibration were used for propagation of ondes reference records created on 2004-09-07, modified on 2016-08-08.
Journal ArticleDOI
Laterally Driven Polysilicon Resonant Microstructures
TL;DR: In this article, a 2 μm-thick phosphorus-doped low-pressure chemical-vapor-deposited (LPCVD) polysilicon film was used for exciting the resonance.
Journal ArticleDOI
Quality factors in micron- and submicron-thick cantilevers
TL;DR: In this article, measurements of the mechanical quality factor Q for arrays of silicon-nitride, polysilicon, and single-crystal silicon cantilevers have been obtained by studying the dependence of Q on cantilever material, geometry, and surface treatments.
Journal ArticleDOI
Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals
Andrew Cleland,Michael L. Roukes +1 more
TL;DR: In this article, a method to fabricate nanometer scale mechanical structures from bulk, single-crystal Si substrates is presented, which does not require low pressure chemical vapor deposition of intermediate masking layers, and the final step in the processing uses a dry etch technique, avoiding the difficulties encountered from surface tension effects when wet processing mechanically delicate or large aspect ratio structures.