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Journal ArticleDOI

Design of Micro-Temperature Sensor Array With Thin Film Thermocouples

Jong Jin Park, +1 more
- 01 Sep 2005 - 
- Vol. 127, Iss: 3, pp 286-289
About: 
This article is published in Journal of Electronic Packaging.The article was published on 2005-09-01. It has received 36 citations till now. The article focuses on the topics: Thin film & Thermocouple.

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Citations
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Journal ArticleDOI

Wearable temperature sensor based on graphene nanowalls

Jun Yang, +8 more
- 09 Mar 2015 - 
TL;DR: In this article, the authors demonstrate an ultrasensitive wearable temperature sensor prepared using an emerging material, graphene nanowalls (GNWs), and its ease of combination with polydimethylsiloxane (PDMS) Fabrication of the sensor allows for a polymer-assisted transfer method making it considerably facile, biocompatible and cost effective.
Journal ArticleDOI

Fabrication of micro sensors on a flexible substrate

Chi-Yuan Lee, +2 more
- 15 Sep 2008 - 
TL;DR: In this article, a flexible micro temperature and humidity sensors on parylene thin films were designed and fabricated using a micro-electro-mechanical-systems (MEMS) process.
Journal ArticleDOI

Thin-Film Thermocouple Array for Time-Resolved Local Temperature Mapping

Haixiao Liu, +3 more
- 23 Sep 2011 - 
TL;DR: In this article, a technique to obtain time-resolved 2D mapping of local temperatures on a solid substrate by employing an array of Cr-Ni thin-film thermocouples (TFTCs) was presented.
Journal ArticleDOI

Use of flexible micro-temperature sensor to determine temperature in situ and to simulate a proton exchange membrane fuel cell

Chi-Yuan Lee, +8 more
- 01 Jan 2011 - 
TL;DR: In this article, a micro-temperature sensor on a 40μm flexible stainless-steel substrate was fabricated using micro-electro-mechanical systems (MEMS).
Journal ArticleDOI

Multiplexed electrical sensor arrays in microfluidic networks

Matthew C. Cole, +1 more
- 02 Mar 2009 - 
TL;DR: This paper seeks to address the first of these deficiencies by introducing a multiplexed sensing architecture capable of monitoring the movement of liquid droplets in large microfluidic networks by using a 4 × 4 multiplexing arrays of resistive and capacitive sensors to monitor the passage of discrete liquid plugs through a micro fluidic network.
References
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Journal ArticleDOI

Scanning thermal microscopy of carbon nanotubes using batch-fabricated probes

Li Shi, +4 more
- 19 Dec 2000 - 
TL;DR: In this article, a batch-fabricated thin-film thermocouple cantilever probes for scanning thermal microscopy (SThM) were used for imaging the phonon temperature distribution of electrically heated carbon-nanotube (CN) circuits.
Journal ArticleDOI

Design and batch fabrication of probes for sub-100 nm scanning thermal microscopy

Li Shi, +3 more
- 01 Sep 2001 - 
TL;DR: In this article, a batch fabrication process has been developed for making cantilever probes for scanning thermal microscopy (SThM) with spatial resolution in the sub-100 nm range.
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High temperature materials for thin-film thermocouples on silicon wafers

Kenneth G. Kreider, +1 more
- 01 Nov 2000 - 
TL;DR: In this paper, an instrumented calibration wafer for radiometric temperature measurements in rapid thermal processing (RTP) tools for semiconductor processing was developed, which has sputter deposited thin-film thermocouples to minimize the thermal disturbance of the wafer by the sensors.
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Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers

Kenneth G. Kreider, +1 more
- 30 Jun 1998 - 
TL;DR: A platinum versus palladium thin-film thermocouple system has been established for measuring temperatures on silicon wafers in a rapid thermal processing (RTP) tool.
Journal ArticleDOI

Thin film TiC/TaC thermocouples

Hemanshu D. Bhatt, +3 more
- 26 Mar 1999 - 
TL;DR: In this paper, the sheet resistance of thin-film thermocouple applications was investigated using a four-point probe, and it was observed that thin films of TaC and TiC yield fairly high and stable thermoemf throught the temperature range of stability.