Journal ArticleDOI
Electron beam generated phase zone plates with 30 nm zonewidth for high resolution X-ray microscopy
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TLDR
In this paper, germanium phase zone plates are used as objective lenses for high-resolution X-ray imaging at 2.4 nm wavelength, where the phase shifting properties of the germanum can be used to enhance the diffraction efficiency of a zone plate.Abstract:
The authors report the manufacture of germanium phase zone plates as objective lenses for high resolution X-ray imaging at 2.4 nm wavelength. The phase shifting properties of the germanium can be used to enhance the diffraction efficiency of a zone plate. Zone plate patterns with structure widths down to 30 nm are generated by low distortion electron beam lithography. The structures are transferred into a 280 nm thick layer of germanium by reactive ion etching (RIE) using a highly selective trilevel mask. 100 nm thick boron doped silicon windows made from single crystal wafers serve as high transmission support membranes. Measurements at the BESSY storage ring proved diffraction efficiencies up to 6.2%. X-ray imaging of a test object showed clearly resolved 30 nm features.read more
Citations
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Journal ArticleDOI
Soft X-ray microscopes and their biological applications
TL;DR: The answer depends on a combination of resolution, penetrating power, analytical sensitivity, compatibility with wet specimens, and the ease of image interpretation.
Journal ArticleDOI
E-beam lithography and electrodeposition fabrication of thick nanostructured devices
T. N. Lo,Yu-Tung Chen,Yu-Tung Chen,C. W. Chiu,Chi-Jen Liu,Syue-Ren Wu,Syue-Ren Wu,I-Kuan Lin,C. I. Su,C. I. Su,W. D. Chang,W. D. Chang,Yeukuang Hwu,Yeukuang Hwu,Yeukuang Hwu,B. Y. Shew,C C Chiang,Jung Ho Je,Giorgio Margaritondo +18 more
TL;DR: A nanofabrication approach based on advanced e-beam lithography and electrodeposition successfully produced high-resolution (≈40nm line width) metal structures with high aspect ratio (>12) and high density as mentioned in this paper.
Journal ArticleDOI
Description of an x-ray microscope with 30 nm resolution
Robin Medenwaldt,Erik Uggerho +1 more
TL;DR: The Aarhus x-ray microscope as discussed by the authors has been in operation for some years and has evolved into a scientific user facility, the activities of which include a wide range of applications.
Journal ArticleDOI
Diffraction optics for X-ray imaging
TL;DR: In this paper, the fabrication of high resolution zone plates and condenser zone plates is discussed using electron beam lithography, UV laser lithography and pattern transfer by reactive ion etching.
References
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Journal ArticleDOI
Spiegelsysteme streifenden Einfalls als abbildende Optiken für Röntgenstrahlen
TL;DR: In this article, the authors define Optiken zur Rontgenstrahlmikroskopie eignen sich Systeme von total-reflektierenden Spiegeln, die bei Hebung der spharischen Aberration fur einen Achsenpunkt zugleich die Abbesche Sinusbedingung bis zu Aperturen 0,05 befriedigend erfullen.
Journal ArticleDOI
Phase zone plates for x rays and the extreme uv
TL;DR: In this article, phase reversal zone plates are designed for regions of the electromagnetic spectrum where the index of refraction is complex, with a real part close to 1.0, and materials with suitable optical and mechanical properties exist throughout most of the 1-800-A wavelength range for their construction.
Journal ArticleDOI
Resolving Power of a Zone Plate
TL;DR: In this article, the resolution of two point sources by a zone plate is analyzed with respect to the number of zones, and it is determined that for N (number of zones) less than 200 the limit of resolution is greater than that of a lens with the same aperture diameter, D, if only the zones which contribute light with a positive phase to the point of observation are used.
ReportDOI
A Preliminary Report on X-Ray Photoabsorption Coefficients and Atomic Scattering Factors for 92 Elements in the 10-10,000 eV Region
TL;DR: Based on currently available photoabsorption measurements and recent theoretical calculations by Doolen and Liberman (Physica Scripta 36, 77 (1987)), a revised (from ADNDT 27, 1 (1982)) best-fit determination of the photo absorption cross sections is presented here for the elements Z=1 to Z=92 in the 10-10,000 eV range as mentioned in this paper.
Journal ArticleDOI
Moiré method and zone plate pattern inaccuracies
Y. Vladimirsky,H. W. P. Koops +1 more
TL;DR: In this paper, the authors analyzed the effect of the distortions on the properties of a superimposed zone plate with common types of pattern inaccuracies, such as ellipticity, radial displacement, and nonconcentricity.