Journal ArticleDOI
Moiré method and zone plate pattern inaccuracies
Y. Vladimirsky,H. W. P. Koops +1 more
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TLDR
In this paper, the authors analyzed the effect of the distortions on the properties of a superimposed zone plate with common types of pattern inaccuracies, such as ellipticity, radial displacement, and nonconcentricity.Abstract:
Moire patterns obtained from superimposed zone plates with common types of pattern inaccuracies are analyzed. Tolerances for the distortions characterized as ellipticity, radial displacement, and nonconcentricity of the zones, are obtained from the corresponding equations for lenses. The formulas for moire fringes resulting from superimposed zone plate patterns having these defects are derived. The feasibility of moire pattern techniques to detect and measure inaccuracies of the zone plate is demonstrated. The sensitivity and the limitations of the method are discussed.read more
Citations
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Journal ArticleDOI
Fabrication of circular optical structures with a 20 nm minimum feature size using nanoimprint lithography
TL;DR: In this paper, the fabrication of Fresnel zone plates with a 75 nm minimum feature size and circular gratings with a 20 nm minimum linewidth in polymethyl methacrylate using nanoimprint lithography, and in metals by means of a lift-off technique was demonstrated.
Patent
Device manufacture involving lithographic processing
Steven D. Berger,J. M. Gibson +1 more
TL;DR: In this paper, a back focal plane filter is used to produce mask patterns which produce images based on discrimination as between scattered and unscattered radiation by accelerated electrons, which is a particularly important fabrication approach.
Journal ArticleDOI
Rapid prototyping of Fresnel zone plates via direct Ga(+) ion beam lithography for high-resolution X-ray imaging.
TL;DR: This work demonstrates an alternative method that allows the direct, simple, and fast fabrication of FZPs using focused Ga(+) beam lithography practically, in a single step and is expected to increase the accessibility of high-resolution optics to a wider community of researchers working on soft X-ray and extreme ultraviolet microscopy using synchrotron radiation and advanced laboratory sources.
Journal ArticleDOI
Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures
Marcel Mayer,Corinne Grévent,Adriana Szeghalmi,Mato Knez,Markus Weigand,S. Rehbein,G. Schneider,Brigitte Baretzky,Gisela Schütz +8 more
TL;DR: This work shows a novel method to fabricate FZPs based on multilayer deposition with atomic layer deposition (ALD) and subsequent sectioning with focused ion beam (FIB) and presents high potential for high resolution microscopy in both the soft and hard X-ray range.
Journal ArticleDOI
Ion beam lithography for Fresnel zone plates in X-ray microscopy.
Kahraman Keskinbora,Corinne Grévent,Michael Bechtel,Markus Weigand,Eberhard Goering,Achim Nadzeyka,Lloyd Peto,Stefan Rehbein,Gerd Schneider,Rolf Follath,Joan Vila-Comamala,Hanfei Yan,Gisela Schütz +12 more
TL;DR: It is shown that ion beam lithography (IBL) may advantageously simplify Fresnel Zone Plates preparation and measured efficiencies in the 1st and 2nd order of diffraction reach the theoretical predictions.